...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities
【24h】

Mass spectrometry of positive ions in capacitively coupled low pressure RF discharges in oxygen with water impurities

机译：氧与水杂质的电容耦合低压RF放电中正离子的质谱分析

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

A capacitively coupled RF oxygen discharge is studied by means of mass spectroscopy. Mass spectra of neutral and positive species are measured in the mid plane between the electrodes at different distances between plasma and mass-spectrometer orifice. In the case of positive ions, as expected, the largest flux originates from O-2(+). However, a significant number of impurities are detected, especially for low input powers and larger distances. The most abundant positive ions (besides O-2(+)) are NO+, NO2+, H+(H2O), and H+(H2O)(2). In particular, for the case of hydrated hydronium ions H+(H2O)(n) (n = 1, 2) a surprisingly large flux (for low pressure plasma conditions) is detected. Another interesting fact concerns the H2O+ ions. Despite the relatively high ammount of water impurities H2O+ ions are present only in traces. The reaction mechanisms leading to the production of the observed ions, especially the hydrated hydronium ions are discussed.
机译：借助于质谱研究了电容耦合的RF氧放电。在等离子体和质谱仪孔之间的不同距离处，在电极之间的中间平面中测量中性和阳性物质的质谱。如预期的那样，在阳离子的情况下，最大通量来自O-2（+）。但是，检测到大量杂质，特别是对于低输入功率和较大距离的情况。最丰富的正离子（O-2（+）除外）为NO +，NO2 +，H +（H2O）和H +（H2O）（2）。特别是，对于水合氢离子H +（H2O）（n）（n = 1、2），检测到大流量（对于低压等离子体条件）。另一个有趣的事实涉及H2O +离子。尽管水中杂质的含量相对较高，但H2O +离子仅以痕量存在。讨论了导致观察到的离子产生的反应机理，尤其是水合水合氢离子。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号