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首页> 外文期刊>Journal of Physics. Condensed Matter >Ion beam sputtering nanopatterning of thin metal films: the synergism of kinetic self-organization and coarsening
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Ion beam sputtering nanopatterning of thin metal films: the synergism of kinetic self-organization and coarsening

机译：金属薄膜的离子束溅射纳米构图：动力学自组织与粗化的协同作用

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Creation of self-organized surface nanostructures by ion beam sputtering (IBS) has strong potential for use in a broad range of technologies, from nanoelectronics and photonics to sensing and catalysis. Recently, we have developed a simple two-stage process for fabricating self-assembled arrays of Cu dots and lines on Si and SiO_2 substrates employing IBS of thin Cu films. We found that the self-assembled structures on the substrate result from a complex interaction between the structure-forming kinetic instability and various outcomes of the surface diffusion and coarsening, which tend to drive the surface pattern towards a thermodynamic equilibrium. Here, we analyze in detail the interplay of the kinetic nanopatterning and coarsening, in order to better understand the mechanisms defining the IBS-generated metallic structures on substrates of a different material. By means of kinetic Monte Carlo (KMC) modeling we investigate the pertinent trends of the self-organization at the surface of a metallic film. In the light of this discussion, we review the fabricated nanostructures. Finally, we present a KMC model of the two-stage IBS process and analyze the stability of the fabricated metal patterns at the surface of a substrate. We discuss the opportunities and challenges of this technique, concluding that the IBS creation of surface heterostructures provides considerable room for future numerical and experimental studies.
机译：通过离子束溅射（IBS）产生自组织表面纳米结构具有强大的潜力，可广泛用于从纳米电子学和光子学到传感和催化的各种技术。最近，我们已经开发了一种简单的两阶段工艺，该工艺使用薄Cu膜的IBS在Si和SiO_2衬底上制造Cu点和线的自组装阵列。我们发现，基底上的自组装结构是由形成结构的动力学不稳定性与表面扩散和粗化的各种结果之间的复杂相互作用导致的，这些趋于将表面图案推向热力学平衡。在这里，我们详细分析动力学纳米图案和粗化的相互作用，以便更好地理解在不同材料的基板上定义IBS生成的金属结构的机理。通过动力学蒙特卡洛（KMC）建模，我们研究了金属膜表面自组织的相关趋势。根据这一讨论，我们回顾了所制造的纳米结构。最后，我们提出了两阶段IBS工艺的KMC模型，并分析了在基板表面上制造的金属图案的稳定性。我们讨论了该技术的机遇和挑战，认为IBS表面异质结构的创建为将来的数值和实验研究提供了很大的空间。

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