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Analysis of ZnS and MgF2 layered nanostructures grown by glancing angle deposition for optical design

机译：光学设计透明角沉积ZnS和MgF2分层纳米结构的分析

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This study investigated the multilayer growth and properties of ZnS and MgF2 using glancing angle deposition. We used deposition angles of 85 degrees-89 degrees for ZnS and 70 degrees-88 degrees for MgF2 to obtain the structural properties. The film properties primarily followed Tait's rule with a deposition angle of less than 87 degrees in the vapor flux. However, film growth with a vapor flux angle of 88 degrees-89 degrees followed the tangent rule. Mathematical and cross-sectional scanning electron microscopy examinations found a transition point for the growth mechanisms at 87 degrees, which comes from an extreme angle property for glancing angle deposition. We also performed mathematical derivations for the well-known empirical formula of the tangent rule and its generalized version. To stabilize the interface structure and surface roughness of multilayer structures, film growth at slightly tilted angles is recommended. Based on these results, an optical structure was designed, fabricated, and analyzed for a 550 nm wavelength pass filter on a glass substrate.
机译：本研究研究了使用透明角沉积的ZnS和MgF2的多层生长和性质。我们使用85度-89度的沉积角度对于ZnS和70度-88度的MGF2获得结构性质。薄膜性质主要沿着蒸汽通量沉积角度追加馏分的规则。然而，具有88度-89度的蒸汽通量角的薄膜生长遵循切线规则。数学和横截面扫描电子显微镜检查发现了87度的生长机制的过渡点，这来自用于透明角沉积的极端角度特性。我们还对切线规则的众所周知的经验公式及其广义版本进行了数学推导。为了稳定多层结构的界面结构和表面粗糙度，建议使用略微倾斜的角度的薄膜生长。基于这些结果，在玻璃基板上为550nm波长过滤器进行设计，制造和分析光学结构。

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