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Random dopant fluctuations and statistical variability in n-channel junctionless FETs

机译:N沟道连接FET中随机掺杂剂波动及统计变异性

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The influence of random dopant fluctuations on the statistical variability of the electrical characteristics of n-channel silicon junctionless nanowire transistor (JNT) has been studied using three dimensional quantum simulations based on the non-equilibrium Green's function (NEGF) formalism. Average randomly distributed body doping densities of 2 x 10(19), 6 x 10(19) and 1 x 10(20) cm(-3) have been considered employing an atomistic model for JNTs with gate lengths of 5, 10 and 15 nm. We demonstrate that by properly adjusting the doping density in the JNT, a near ideal statistical variability and electrical performance can be achieved, which can pave the way for the continuation of scaling in silicon CMOS technology.
机译:采用基于非平衡绿色函数(NegF)形式主义的三维量子模拟研究了随机掺杂剂波动对N沟道硅结纳米线晶体管(JNT)的电特性统计变异的影响。 已经考虑使用2×10(19),6×10(19)和1×10(20)cm(-3)的平均随机分布的主体掺杂密度,用于采用具有5,10和15的栅极长度的JNT的原子模型 纳米。 我们证明,通过适当地调节JNT中的掺杂密度,可以实现近乎理想的统计变异性和电气性能,这可以铺平硅CMOS技术中的缩放的延续。

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