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Fabrication of flexible highly ordered porous alumina templates by combined nanosphere lithography and anodization

机译：纳米光光刻和阳极氧化组合的柔性高度有序多孔氧化铝模板的制造

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In this work, we propose a new method for the large-scale production of flexible, periodic alumina arrays with well-ordered pores. We show the incorporation of pre-patterning based on. polystyrene (PS) nanosphere lithography into an aluminium anodization process. We prepared ordered monolayers of PS spheres with average diameters of (510 +/- 10) nm. and (430 +/- 10) nm on a large area (1.5 x 1.5 cm(2)) of the Si substrate. Next, we deposited a. 5 mu m aluminium layer on arrays of PS nanospheres using the sputtering technique. After the deposition, we covered the aluminium film with a polymer Scotch adhesive tape, and separated it from the silicon substrate by ultrasonic-assisted lift-off. Finally, we performed the anodization of the aluminium. We compared the pore and cell sizes, and the pore distance for. the templates obtained by this technique, with reference to the templates prepared by a two-step anodization process. Using this. new approach, we obtained highly ordered hexagonal 2D lattices over a large area of up to 2 cm(2) with sparse defects, amounting to. not more than four defects per 1000 mu m(2) on average. Here, we show that the use of indentation techniques is not necessary and can be replaced by a fast, cheap. and easy pre-patterning step based on nanosphere lithography.
机译：在这项工作中，我们提出了一种新的柔性生产的大规模生产方法，具有良好有序的毛孔。我们展示了基于PRETTERNING的结合。聚苯乙烯（PS）纳米光刻到铝阳极氧化过程中。我们准备了具有（510 +/- 10）nm的平均直径的PS球的订购单片。 （在大面积（1.5×1.5cm（2））的Si衬底上的（430 +/- 10）nm。接下来，我们存放了一个。使用溅射技术在PS纳米球阵列上的5μm铝层。沉积后，我们用聚合物透明胶带覆盖铝膜，通过超声波辅助剥离将其与硅衬底分开。最后，我们进行了铝的阳极氧化。我们比较了孔隙和细胞尺寸，以及孔隙距离。通过该技术获得的模板，参考由两步阳极化过程制备的模板。使用这个。新方法，我们在大面积上获得高度有序的六边形2D格子，稀疏缺陷，较为稀疏。平均每1000 mu m（2）不超过四种缺陷。在这里，我们表明，不需要使用压痕技术，并且可以通过快速，便宜的替换。基于纳米光刻的易于图案化步骤。

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