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Suspended tungsten-based nanowires with enhanced mechanical properties grown by focused ion beam induced deposition

机译:基于钨基的纳米线,通过聚焦离子束诱导沉积增强机械性能

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The implementation of three-dimensional (3D) nano-objects as building blocks for the next generation of electro-mechanical, memory and sensing nano-devices is at the forefront of technology. The direct writing of functional 3D nanostructures is made feasible by using a method based on focused ion beam induced deposition (FIBID). We use this technique to grow horizontally suspended tungsten nanowires and then study their nano-mechanical properties by three-point bending method with atomic force microscopy. These measurements reveal that these nanowires exhibit a yield strength up to 12 times higher than that of the bulk tungsten, and near the theoretical value of 0.1 times the Young's modulus (E). We find a size dependence of E that is adequately described by a core-shell model, which has been confirmed by transmission electron microscopy and compositional analysis at the nanoscale. Additionally, we show that experimental resonance frequencies of suspended nanowires (in the MHz range) are in good agreement with theoretical values. These extraordinary mechanical properties are key to designing electro-mechanically robust nanodevices based on FIBID tungsten nanowires.
机译:三维(3D)纳米物体作为下一代电力,存储器和感测纳米装置的构建块的实现是技术的最前沿。功能3D纳米结构的直接写入通过使用基于聚焦离子束诱导沉积(腓骨)的方法来实现。我们利用该技术来生长水平悬浮的钨纳米线,然后通过具有原子力显微镜的三点弯曲方法研究其纳米机械性能。这些测量结果表明,这些纳米线表现出高于散装钨的产率强度高达12倍,并且在杨氏模量(E)的0.1倍的理论值附近。我们发现E的尺寸依赖性由核心壳模型充分描述,该模型已经通过透射电子显微镜证实和纳米级的组成分析证实。另外,我们表明悬浮纳米线的实验谐振频率(在MHz范围内)与理论值吻合良好。这些非凡的机械性能是基于腓骨钨纳米线设计电动鲁棒纳米型的关键。

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