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首页> 外文期刊>Nanotechnology >Fabrication of highly ordered 2D metallic arrays with disc-in-hole binary nanostructures via a newly developed nanosphere lithography
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Fabrication of highly ordered 2D metallic arrays with disc-in-hole binary nanostructures via a newly developed nanosphere lithography

机译：通过新开发的纳米光刻制造高度有序的2D金属阵列，通过新开发的纳米光刻用椎间盘内二元纳米结构

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摘要

2D metallic arrays with binary nanostructures derived from a nanosphere lithography (NSL) method have been rarely reported. Here, we demonstrate a novel NSL strategy to fabricate highly ordered 2D gold arrays with disc-in-hole binary (DIHB) nanostructures in large scale by employing a sacrificing layer combined with a three-step lift-off process. The structural parameters of the resultant DIHB arrays, such as periodicity, hole diameter, disc diameter and thicknesses can be facilely controlled by tuning the nanospheres size, etching condition, deposition angle and duration, respectively. Due to the intimate interactions between two subcomponents, the DIHB arrays exhibit both an extraordinary high surface-enhanced Raman scattering enhancement factor up to 5 x 10(8) and a low sheet resistance down to 1.7 Omega/sq. Moreover, the DIHB array can also be used as a metal catalyzed chemical etching catalytic pattern to create vertically-aligned Si nano-tube arrays for anti-reflectance application. This strategy provides a universal route for synthesizing other diverse binary nanostructures with controlled morphology, and thus expands the applications of the NSL to prepare ordered nanostructures with multi-function.
机译：已经很少报道2D具有衍生自纳米光刻（NSL）方法的二元纳米结构的金属阵列。这里，我们证明了一种新的NSL策略，以通过采用牺牲层与三步剥离工艺结合使用牺牲层来制造高度有序的2D金阵列与圆盘内二元（DIHB）纳米结构。通过分别调谐纳米球尺寸，蚀刻条件，沉积角度和持续时间，可以易于控制所得DIHB阵列的结构参数，例如周期性，孔直径，盘直径和厚度。由于两个子组件之间的密切相互作用，DIHB阵列表现出非凡的高表面增强拉曼散射增强因子，高达5×10（8）和低薄层电阻下降至1.7ω/ SQ。此外，DIHB阵列也可用作金属催化的化学蚀刻催化图案，以产生用于抗反射施加的垂直对齐的Si纳米管阵列。该策略提供了一种通用途径，用于合成具有受控形态的其他不同二元纳米结构，从而扩展NSL的应用，以用多功能制备有序纳米结构。

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  • 来源
    《Nanotechnology》 |2017年第47期|共10页
  • 作者

    Yang Xi; Guo Wei; Wang Xixi; Liao Mingdun; Gao Pingqi; Ye Jichun;

  • 作者单位

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 特种结构材料;
  • 关键词

    nanosphere lithography; binary arrays; nano-hole/-disc; nano-tube; SERS;

    机译：纳米圈光刻;二元阵列;纳米孔/ -DISC;纳米管;SERS;

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