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Highly sensitive p-type 4H-SiC van der Pauw sensor

机译：高度敏感的P型4H-SiC van der Pauw传感器

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摘要

This paper presents for the first time a p-type 4H silicon carbide (4H-SiC) van der Pauw strain sensor by utilizing the strain induced effect in four-terminal devices. The sensor was fabricated from a 4H-SiC (0001) wafer, using a 1 mm thick p-type epilayer with a concentration of 1018 cm(-3). Taking advantage of the four-terminal configuration, the sensor can eliminate the need for resistance-to-voltage conversion which is typically required for two-terminal devices. The van der Pauw sensor also exhibits an excellent repeatability and linearity with a significantly large output voltage in induced strain ranging from 0 to 334 ppm. Various sensors aligned in different orientations were measured and a high sensitivity of 26.3 ppm(-1) was obtained. Combining these performances with the excellent mechanical strength, electrical conductivity, thermal stability, and chemical inertness of 4H-SiC, the proposed sensor is promising for strain monitoring in harsh environments.
机译：本文通过利用四个端子装置中的应变诱导效应，首次呈现第一次P型4H碳化硅（4H-SIC）范德波杆菌株应变传感器。 使用浓度为1018cm（-3）的1mm厚的p型外膜，从4H-SiC（0001）晶片制成传感器。 利用四个端子配置，传感器可以消除对电阻到电压转换的需要，这通常需要两个终端设备。 Van der Pauw传感器还具有出色的可重复性和线性，具有显着大的输出电压，诱导的应变范围为0至334ppm。 测量以不同取向对准的各种传感器，得到高敏感性为26.3ppm（-1）。 将这些性能与优异的机械强度，电导率，热稳定性和4H-SiC的化学惰性相结合，该传感器在恶劣环境中承诺进行应变监测。

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  • 来源
    《RSC Advances》 |2018年第6期|共5页
  • 作者

    Nguyen Tuan-Khoa; Phan Hoang-Phuong; Han Jisheng; Dinh Toan; Foisal Abu Riduan Md; Dimitrijev Sima; Zhu Yong; Nguyen Nam-Trung; Dao Dzung Viet;

  • 作者单位

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

    Griffith Univ Queensland Micronanotechnol Ctr Brisbane Qld 4111 Australia;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
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