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Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration

机译：纳米剧间电极室温下的气体传感性能，以检测低浓度丙酮

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摘要

A facile approach for the fabrication of large-scale interdigitated nanogap electrodes (nanogap IDEs) with a controllable gap was demonstrated with conventional micro-fabrication technology to develop chemocapacitors for gas sensing applications. In this work, interdigitated nanogap electrodes (nanogap IDEs) with gaps from 50-250 nm have been designed and processed at full wafer-scale. These nanogap IDEs were then coated with poly(4-vinyl phenol) as a sensitive layer to form gas sensors for acetone detection at low concentrations. These acetone sensors showed excellent sensing performance with a dynamic range from 1000 ppm to 10 ppm of acetone at room temperature and the observed results are compared with conventional interdigitated microelectrodes according to our previous work. Sensitivity and reproducibility of devices are discussed in detail. Our approach of fabrication of nanogap IDEs together with a simple coating method to apply the sensing layer opens up possibilities to create various nanogap devices in a cost-effective manner for gas sensing applications.
机译：用常规的微制造技术对具有可控间隙进行可控间隙的大规模中间纳米盖电极（纳米盖IDE）的容纳方法是用常规的微制造技术来开发用于气体传感应用的化学容器。在这项工作中，在全晶片级中设计和加工了50-250nm的间隙中的漫游纳米盖电极（纳米隙IDE）。然后用聚（4-乙烯基苯酚）作为敏感层涂覆这些纳米粥IDE，以在低浓度下形成用于丙酮检测的气体传感器。这些丙酮传感器表现出优异的感测性能，在室温下从1000ppm至10ppm的丙酮中的动态范围，并且观察结果与根据我们之前的工作相比传统的互通的微电极进行比较。详细讨论了装置的灵敏度和再现性。我们将纳米孔IDE的制造方法与简单的涂层方法一起使用以应用感测层的可能性以具有成本有效的气体传感应用来创建各种纳米剧装置的可能性。

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  • 来源
    《RSC Advances》 |2017年第79期|共8页
  • 作者

    Nguyen Minh Q.; Tong H. D.; Kuijk A.; van de Bent F.; Beekman P.; van Rijn C. J. M.;

  • 作者单位

    Wageningen Univ &

    Res Lab Organ Chem Stippeneng 4 NL-6708 WE Wageningen Netherlands;

    Ton Duc Thang Univ Ceram &

    Biomat Res Grp Ho Chi Minh City Vietnam;

    Wageningen Univ &

    Res Lab Organ Chem Stippeneng 4 NL-6708 WE Wageningen Netherlands;

    HU Univ Appl Sci Utrecht Oudenoord 700 NL-3513 EX Utrecht Netherlands;

    Wageningen Univ &

    Res Lab Organ Chem Stippeneng 4 NL-6708 WE Wageningen Netherlands;

    Wageningen Univ &

    Res Lab Organ Chem Stippeneng 4 NL-6708 WE Wageningen Netherlands;

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  • 正文语种 eng
  • 中图分类 化学;
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