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Gas sensing performance at room temperature of nanogap interdigitated electrodes for detection of acetone at low concentration

机译：用于检测低浓度丙酮的纳米间隙叉指电极在室温下的气敏性能

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A facile approach for the fabrication of large-scale interdigitated nanogap electrodes (nanogap IDEs) with a controllable gap was demonstrated with conventional micro-fabrication technology to develop chemocapacitors for gas sensing applications. In this work, interdigitated nanogap electrodes (nanogap IDEs) with gaps from 50–250 nm have been designed and processed at full wafer-scale. These nanogap IDEs were then coated with poly(4-vinyl phenol) as a sensitive layer to form gas sensors for acetone detection at low concentrations. These acetone sensors showed excellent sensing performance with a dynamic range from 1000 ppm to 10 ppm of acetone at room temperature and the observed results are compared with conventional interdigitated microelectrodes according to our previous work. Sensitivity and reproducibility of devices are discussed in detail. Our approach of fabrication of nanogap IDEs together with a simple coating method to apply the sensing layer opens up possibilities to create various nanogap devices in a cost-effective manner for gas sensing applications.
机译：利用常规的微制造技术证明了一种用于制造具有可控制间隙的大型指状纳米间隙电极（nanogap IDE）的简便方法，可以开发出用于气体传感应用的化学电容器。在这项工作中，已设计和加工了具有50-250 nm间隙的叉指式纳米间隙电极（nanogap IDE），并在整个晶圆规模上进行了处理。然后将这些纳米间隙IDE涂有聚（4-乙烯基苯酚）作为敏感层，以形成用于低浓度丙酮检测的气体传感器。这些丙酮传感器在室温下的丙酮动态范围为1000 ppm至10 ppm时显示出出色的感测性能，根据我们以前的工作，将观察到的结果与传统的叉指式微电极进行了比较。详细讨论了设备的灵敏度和可重复性。我们的纳米间隙IDE的制造方法以及用于施加传感层的简单涂覆方法，为以低成本方式为气体传感应用创造各种纳米间隙器件提供了可能性。

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