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High efficiency Al/Sc-based multilayer coatings in the EUV wavelength range above 40 nanometers

机译：高效的Al / SC基多层涂层在EUV波长范围内以上40纳米

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摘要

In this Letter, we have developed new and highly efficient periodic multilayer mirrors Al/Sc, Al/Sc/SiC, and Mo/Al/Sc with optimized reflectance at wavelengths between 40 and 65 nm. We have reached record values in measured peak reflectance: 57.5% at 44.7 nm and 46.5% at 51 nm, with Al/Sc/SiC at near-normal incidence. Furthermore, to the best of our knowledge, we have achieved the largest reported bandwidth with Mo/Al/Sc at 57 nm and the narrowest bandwidth with Al/Sc at a 60 nm wavelength. These new and promising results demonstrate that Al/Sc-based multilayer coatings are excellent candidates for future generations of extreme ultraviolet (EUV) instruments for solar physics, EUV lasers, and attosecond science, in a wavelength range that has not been fully explored. (C) 2020 Optical Society of America
机译：在这封信中，我们开发了新的和高效的周期性多层镜子Al / SC，Al / SC / SiC，以及Mo / Al / Sc，其在40和65nm之间的波长下的优化反射率。 我们已达到测量峰值反射率的记录值：51.7nm处的57.5％，51nm处为46.5％，近乎正常发病率为Al / Sc / SiC。 此外，据我们所知，我们已经在57nm处的Mo / Al / Sc和60nm波长的Al / Sc的最窄带宽实现了最大报告的带宽。 这些新的和有前途的结果表明，基于Al / SC的多层涂层是用于太阳能物理，EUV激光器和AtosoSecond科学的后代的优秀候选者，其在尚未完全探索的波长范围内。 （c）2020美国光学学会

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