Dual-polarization silicon nitride Bragg filters with low thermal sensitivity

Duran-Valdeiglesias Elena; Guerber Sylvain; Oser Dorian; Le Roux Xavier; Benedikovic Daniel; Perez-Galacho Diego; Vulliet Nathalie; Cremer Sebastien; Monfray Stephane; Cassan Eric; Marris-Morini Delphine; Baudot Charles; Boeuf Frederic; Vivien Laurent; Alonso-Ramos Carlos

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Dual-polarization silicon nitride Bragg filters with low thermal sensitivity

机译：具有低热灵敏度的双极化氮化硅布拉格过滤器

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Wideband and polarization-independent wavelength filters with low sensitivity to temperature variations have great potential for wavelength division multiplexing applications. However, simultaneously achieving these metrics is challenging for silicon-on-insulator photonics technology. Here, we harness the reduced index contrast and the low thermo-optic coefficient of silicon nitride to demonstrate waveguide Bragg grating filters with wideband apolar rejection and low thermal sensitivity. Filter birefringence is reduced by judicious design of a triangularly shaped lateral corrugation. Based on this approach, we demonstrate silicon nitride Bragg filters with a measured polarization-independent 40 dB optical rejection with negligible off-band excess loss, and a sensitivity to thermal variations below 20 pm/degrees C. (C) 2019 Optical Society of America

机译：具有低灵敏度的宽带和偏振的波长滤波器对温度变化的低灵敏度具有很大的波分复用应用的潜力。然而，同时实现这些度量是硅 - 绝缘体光子学技术的具有挑战性。在这里，我们利用诸如氮化硅的降低的索引对比度和低热光学系数，以展示具有宽带非极性抑制和低热灵敏度的波导布拉格光栅过滤器。通过三角形横向波纹的明智设计减少了过滤器双折射。基于这种方法，我们展示了具有测量的偏振无关的40dB光学抑制的氮化硅布拉格滤光器，其偏远过度损失可忽略不计，以及对美国光学学会的20μm/℃的热变化的敏感性

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来源
《Optics Letters》 |2019年第18期|共4页
作者
Duran-Valdeiglesias Elena; Guerber Sylvain; Oser Dorian; Le Roux Xavier; Benedikovic Daniel; Perez-Galacho Diego; Vulliet Nathalie; Cremer Sebastien; Monfray Stephane; Cassan Eric; Marris-Morini Delphine; Baudot Charles; Boeuf Frederic; Vivien Laurent; Alonso-Ramos Carlos;
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Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

STMicroelect SAS 850 Rue Jean Monnet F-38920 Crolles France;

STMicroelect SAS 850 Rue Jean Monnet F-38920 Crolles France;

STMicroelect SAS 850 Rue Jean Monnet F-38920 Crolles France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

STMicroelect SAS 850 Rue Jean Monnet F-38920 Crolles France;

STMicroelect SAS 850 Rue Jean Monnet F-38920 Crolles France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

Univ Paris Saclay Univ Paris Sud CNRS Ctr Nanosci &

Nanotechnol F-91120 Palaiseau France;

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正文语种 eng
中图分类计量学;光学;
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专利

1. Dual-polarization silicon nitride Bragg filters with low thermal sensitivity [J] . Duran-Valdeiglesias Elena, Guerber Sylvain, Oser Dorian, Optics Letters . 2019,第18期

机译：具有低热灵敏度的双极化氮化硅布拉格过滤器
2. Polymer embedded silicon nitride thermally tunable Bragg grating filters [J] . Ziyang Zhang, Dongliang Liu, David de Felipe, Applied Physics Letters . 2013,第18期

机译：聚合物嵌入式氮化硅热可调布拉格光栅滤波器
3. Compact and tunable silicon nitride Bragg grating filters in polymer [J] . Ziyang Zhang, Alejandro Maese Novo, Dongliang Liu, Optics Communications: A Journal Devoted to the Rapid Publication of Short Contributions in the Field of Optics and Interaction of Light with Matter . 2014,第Null期

机译：聚合物中的紧凑型可调谐氮化硅布拉格光栅滤光片
4. Multi-channel wavelength filtering in silicon-nitride Bragg grating waveguide [C] . Goi K., Ogawa K., Sakuma K., 2011 16th OptoeElectronics and Communications Conference . 2011

机译：氮化硅布拉格光栅波导中的多通道波长滤波
5. The low-temperature thermal chemical vapor deposition and catalyzed chemical vapor deposition of aluminum nitride and silicon nitride [D] . Dupuie, Jeffrey L. 1991

机译：氮化铝和氮化硅的低温热化学气相沉积和催化化学气相沉积
6. Nanoporous silicon nitride-based membranes of controlled pore size shape and areal density: Fabrication as well as electrophoretic and molecular filtering characterization [O] . Axel Seidenstücker, Stefan Beirle, Fabian Enderle, 2018

机译：孔径形状和面密度受控的基于纳米多孔氮化硅的膜：制备以及电泳和分子过滤特性
7. The development of a porous silicon nitride crossflow filter; Final report, September 1988--September 1992 [O] . 1992

机译：多孔氮化硅横流过滤器的开发;最终报告，1988年9月至1992年9月
8. Effective passivation of the low resistivity silicon surface by a rapid thermal oxide/PECVD silicon nitride stack and its application to passivated rear and bifacial Si solar cells [R] . Rohatgi, A. , Narasimha, S. , Ruby, D. S. 1998

机译：通过快速热氧化物/ pECVD氮化硅叠层有效钝化低电阻率硅表面及其在钝化后部和双面si太阳能电池中的应用

Dual-polarization silicon nitride Bragg filters with low thermal sensitivity

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