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Customizing topographical templates for aperiodic nanostructures of block copolymers via inverse design

机译：通过逆设计定制对嵌段共聚物的非周期性纳米结构的地形模板

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摘要

The limited complexity of self-assembled nanostructures of block copolymers seriously impedes their potential utility in the semiconductor industry. Therefore, the customizability of complex nanostructures has been a long-standing goal for the utilization of directed self-assembly in nanolithography. Herein, we integrated an advanced inverse design algorithm with a well-developed theoretical model to deduce inverse solutions of topographical templates to direct the self-assembly of block copolymers into reproducible target structures. The deduced templates were optimized by finely tuning the input parameters of the inverse design algorithm and through symmetric operation as well as nanopost elimination. More importantly, our developed algorithm has the capability to search inverse solutions of topographical templates for aperiodic nanostructures over exceptionally large areas. These results reveal design rules for guiding templates for the device-oriented nanostructures of block copolymers with prospective applications in nanolithography.
机译：嵌段共聚物的自组装纳米结构的有限复杂性严重地阻碍了它们在半导体工业中的潜在效用。因此，复杂纳米结构的可定制性是利用纳米线中的定向自组装的长期目标。在此，我们用良好开发的理论模型集成了先进的逆设计算法，从而推翻了地形模板的逆溶液，以将嵌段共聚物的自组装引导到可再现的目标结构中。通过精细调整逆设计算法的输入参数和通过对称操作以及纳米孔消除来优化推导的模板。更重要的是，我们发达的算法具有在异常大区域上搜索对非周期性纳米结构的地形模板的逆解决方案。这些结果揭示了在纳米线中具有前瞻性应用的嵌段共聚物的导向纳米结构的引导模板的设计规则。

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    Zhang Runrong; Zhang Liangshun; Lin Jiaping; Lin Shaoliang;

  • 作者单位

    East China Univ Sci &

    Technol Sch Mat Sci &

    Engn Shanghai Key Lab Adv Polymer Mat Minist Educ State Key Lab Bioreactor Engn Key Lab Ultrafine M Shanghai 200237 Peoples R China;

    East China Univ Sci &

    Technol Sch Mat Sci &

    Engn Shanghai Key Lab Adv Polymer Mat Minist Educ State Key Lab Bioreactor Engn Key Lab Ultrafine M Shanghai 200237 Peoples R China;

    East China Univ Sci &

    Technol Sch Mat Sci &

    Engn Shanghai Key Lab Adv Polymer Mat Minist Educ State Key Lab Bioreactor Engn Key Lab Ultrafine M Shanghai 200237 Peoples R China;

    East China Univ Sci &

    Technol Sch Mat Sci &

    Engn Shanghai Key Lab Adv Polymer Mat Minist Educ State Key Lab Bioreactor Engn Key Lab Ultrafine M Shanghai 200237 Peoples R China;

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  • 正文语种 eng
  • 中图分类 物理学;化学;
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