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首页> 外文期刊>Physics of plasmas >Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap
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Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap

机译：电气应电容耦合射频等离子体的条纹：压力，电压和电极间隙的影响

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摘要

Capacitively coupled radio-frequency (CCRF) CF4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely composed of CF3+ and F- ions) resonates with the excitation frequency. In this work, we explore the effects of the gas pressure, the RF voltage, and the electrode gap on this striated structure by phase resolved optical emission spectroscopy and particle-in-cell/Monte Carlo collisions simulations. The measured electronic excitation patterns at different external parameters show a good general agreement with the spatio-temporal plots of the ionization rate obtained from the simulations. For a fixed driving frequency, the minima of the CF3+ or F- ion densities (between the density peaks in the bulk) are comparable and independent of other external parameters. However, the ion density maxima generally increase as a function of the pressure or RF voltage, leading to the enhanced spatial modulation of plasma parameters. The striation gap (defined as the distance between two ion density peaks) is approximately inversely proportional to the pressure, while it exhibits a weak dependence on the RF voltage and the electrode gap. A transition between the striated and non-striated modes can be observed by changing either the pressure or the RF voltage; for 13.56 and 18 MHz driving frequencies, we present a phase diagram as a function of the pressure and voltage amplitude parameters. Published by AIP Publishing.
机译：已经发现电容耦合射频（CCRF）CF4等离子体在操作条件下表现出自组织的条纹结构，其中等离子体在散装区域中强烈电动和离子离子等离子体（主要由CF3 +和FieN构成。 ）以励磁频率共振。在这项工作中，我们通过相位分辨的光发射光谱和粒子内/蒙特卡罗碰撞模拟来探索气体压力，RF电压和电极间隙对该条纹结构上的电极间隙的影响。不同外部参数的测量电子激发图案显示出与从模拟中获得的电离速率的时空曲线的良好一致。对于固定的驱动频率，CF3 +或F离子密度的最小值（散装中的密度峰之间）是可比的和独立于其他外部参数。然而，离子密度最大值通常随压力或RF电压的函数而增加，导致等离子体参数的增强的空间调制。纹影间隙（定义为两个离子密度峰之间的距离）大约是反比于压力，而它显示出在RF电压和电极间隙的弱依赖性。可以通过改变压力或RF电压来观察条纹和非横向模式之间的过渡;对于13.56和18 MHz驱动频率，我们将相位图作为压力和电压幅度参数的函数提出。通过AIP发布发布。

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  • 来源
    《Physics of plasmas》 |2017年第7期|共16页
  • 作者

    Liu Yong-Xin; Korolov Ihor; Schungel Edmund; Wang You-Nian; Donko Zoltan; Schulze Julian;

  • 作者单位

    Dalian Univ Technol Key Lab Mat Modificat Laser Ion &

    Electron Beams Minist Educ Sch Phys Dalian 116024 Peoples R China;

    Hungarian Acad Sci Inst Solid State Phys &

    Opt Wigner Res Ctr Phys Konkoly Thege Miklos Str 29-33 H-1121 Budapest Hungary;

    Evatec AG CH-9477 Trubbach Switzerland;

    Dalian Univ Technol Key Lab Mat Modificat Laser Ion &

    Electron Beams Minist Educ Sch Phys &

    Optoelect Technol Dalian 116024 Peoples R China;

    Hungarian Acad Sci Inst Solid State Phys &

    Opt Wigner Res Ctr Phys Konkoly Thege Miklos Str 29-33 H-1121 Budapest Hungary;

    Ruhr Univ Bochum Inst Elect Engn D-44801 Bochum Germany;

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  • 正文语种 eng
  • 中图分类 等离子体物理学;
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