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首页> 外文期刊>Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics >Effect of annealing on the structural and thermoelectric properties of nanostructured Sb2Te3/Au semiconductor/metal multilayer films
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Effect of annealing on the structural and thermoelectric properties of nanostructured Sb2Te3/Au semiconductor/metal multilayer films

机译：退火对纳米结构SB2Te3 / Au半导体/金属多层膜的结构和热电性能的影响

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摘要

This paper investigates the influence of thermal annealing temperature on the periodic nanostructures and the thermoelectric properties of Sb2Te3/Au multilayer thin films fabricated by magnetron sputtering. The as-deposited amorphous periodic multilayer films (10 periods, 20 and 7 nm for the Sb2Te3 and Au layers, respectively) show regular and sharp interfaces between Sb2Te3 and Au layers. It was found that the interfaces of periodic films became a little fuzzy and some nanocrystallines could be observed after annealing at relatively lower temperature (373 K) due to atomic diffusion and crystallization. Additionally, obvious crystal grains appeared and the Au layers began to coarsen and even rupture when the annealing temperature was elevated to higher than 423 K. The evolution mechanism has been discussed in the view of grain boundary free energy and interfacial free energy. Furthermore, the experimental results suggest that the resistivity and Seebeck coefficient of the multilayer film sample have not exhibited distinct change until the annealing temperature was increased to as high as 473 K when the periodic nanostructures disappeared. (C) 2019 Elsevier B.V. All rights reserved.
机译：本文研究了热退火温度对由磁控溅射制造的SB2Te3 / Au多层薄膜的周期纳米结构和热电性能的影响。分别沉积的无定形周期性多层膜（SB2Te3和Au层的10个周期，20和7nm）在SB2Te3和Au层之间显示规则和尖锐的界面。结果发现，由于原子扩散和结晶，在在相对较低的温度（373k）下，可以观察到周期性膜的界面变得有点模糊，并且在相对较低的温度（373k）下可以观察到一些纳米晶体。另外，显着的晶粒出现，并且当退火温度升高到高于423k时，Au层开始粗糙甚至破裂。在晶界自由能和界面自由能的视图中讨论了进化机制。此外，实验结果表明，当周期性纳米结构消失时，多层膜样品的电阻率和塞贝克系数尚未表现出明显的变化，直到退火温度增加到高达473k。 （c）2019 Elsevier B.v.保留所有权利。

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