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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Characterization of optical properties and thermo-optic effect for non-polar AlGaN thin films using spectroscopic ellipsometry
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Characterization of optical properties and thermo-optic effect for non-polar AlGaN thin films using spectroscopic ellipsometry

机译：使用光谱椭圆形测定法对非极性AlGaN薄膜的光学性质和热视光效应的表征

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摘要

The non-polar a-plane (11 (2) over bar 20) AlGaN thin films with various Al compositions were grown successfully on the r-plane ( 2 (2) over bar 04) semi-polar sapphire substrates using the continuous growth, two-way pulsed-flow, and three-way pulsed-flow growth methods, respectively with metal-organic chemical vapor deposition. The optical properties and thermo-optic effect of these films were studied extensively for the first time with angle- and temperature-dependent spectroscopic ellipsometry (SE) under both isotropic and anisotropic fitting modes. The SE fitting results for the energy band-gap, the layer thickness, and the surface roughness of the non-polar GaN, AlGaN, and AlN thin films were found to be comparable or even consistent quite well with the characterization results of high-resolution x-ray diffraction, ultraviolet-visible absorption spectroscopy, and atomic force microscopy. It was revealed that the non-polar AlGaN has higher refractive index than its polar counterpart with the same Al composition, and the non-polar AlGaN with the lowest surface roughness could be achieved with the three-way pulsed-flow growth method. Moreover, it was demonstrated that the anisotropy for the non-polar AlGaN thin film increased with increasing the Al composition. These characterization results should be useful for the fabrication of the non-polar AlGaN-based high-temperature power and ultraviolet-polarized optoelectronic devices utilizing thermo-optical effect and optical anisotropy.
机译：使用连续生长，将非极性A平面（11（2）上的杆20）成功生长在R型（2（2）上）半极性蓝宝石基板上成功生长。双向脉冲流动和三通脉冲流量生长方法，分别用金属 - 有机化学气相沉积。在各向同性和各向异性拟合模式下，通过角度和温度依赖的光谱椭圆形测定（SE）在广泛地研究这些膜的光学性质和热光学效果。能量带隙，层厚度和非极性GaN，AlGaN和AlN薄膜的能量带隙，层厚度和表面粗糙度的SE拟合结果与高分辨率的表征结果相比相当或甚至一致。 X射线衍射，紫外 - 可见吸收光谱和原子力显微镜。揭示非极性AlGaN具有比具有相同Al组合物的极性对应物更高的折射率，并且通过三向脉冲生长方法可以实现具有最低表面粗糙度的非极性AlGa。此外，证明了非极性AlGaN薄膜的各向异性随着Al组合物的增加而增加。这些表征结果对于利用热光学效应和光学各向异性制造非极性AlgaN的高温功率和紫外线光电器件的制造。

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