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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N-2
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Helium metastable species generation in atmospheric pressure RF plasma jets driven by tailored voltage waveforms in mixtures of He and N-2

机译：氦稳定性物种在大气压RF等离子喷射中由他和N-2的混合物中的定制电压波形驱动驱动

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摘要

Spatially resolved tunable diode-laser absorption measurements of the absolute densities of He-I (2(3)S(1)) metastables in a micro atmospheric pressure plasma jet operated in He/N-2 and driven by 'peaks'- and 'valleys'-type tailored voltage waveforms are presented. The measurements are performed at different nitrogen admixture concentrations and peak-to-peak voltages with waveforms that consist of up to four consecutive harmonics of the fundamental frequency of 13.56 MHz. Comparisons of the measured metastable densities with those obtained from particle-in-cell/Monte Carlo collision simulations show a good quantitative agreement. The density of helium metastables is found to be significantly enhanced by increasing the number of consecutive driving harmonics. Their generation can be further optimized by tuning the peak-to-peak voltage amplitude and the concentration of the reactive gas admixture. These findings are understood based on detailed fundamental insights into the spatio-temporal electron dynamics gained from the simulations, which show that voltage waveform tailoring allows to control the electron energy distribution function to optimize the metastable generation. A high degree of correlation between the metastable creation rate and the electron impact excitation rate from the helium ground state into the He-I ((3s)S-3(1)) level is observed for some conditions which may facilitate an estimation of the metastable densities based on phase resolved optical emission spectroscopy measurements of the 706.5 nm He-I line originating from the above level and metastable density values at proper reference conditions.
机译：空间解决的可调谐二极管激光吸收测量He-i（2（3）（1））的绝对密度在HE / N-2中的微型大气压等离子体喷射中的替代品中的绝对密度，并由“峰和”驱动展示了valleys'-型定制电压波形。测量以不同的氮气混合物浓度和具有波形的峰 - 峰值电压进行，该波形由最多四个连续四个谐波的基频为13.56MHz。测量的亚稳密度与来自粒子内/蒙特卡罗碰撞模拟的测量的亚稳态的比较显示出良好的定量协议。通过增加连续驾驶谐波的数量，发现氦衡量的密度明显增强。通过调整峰值到峰值电压幅度和反应性气体混合物的浓度，可以进一步优化它们的发电。这些发现基于从模拟中获得的时空电子动力学的详细基本洞察力，表明电压波形剪裁允许控制电子能量分布功能以优化亚稳态的产生。在一些条件下观察到从氦气接地状态到He-1（（3S）S-3（1））水平之间的高度相关性，这可能有助于估计基于相位解析的光发射光谱测量的亚稳密度测量来自上述水平和亚稳密度值的706.5nm He-i线。

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