...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Dependence of reactive species generation on microwave pulse parameters in atmospheric argon/oxygen plasma
【24h】

Dependence of reactive species generation on microwave pulse parameters in atmospheric argon/oxygen plasma

机译：反应性物种在大气氩/氧等离子体中产生微波脉冲参数的依赖性

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The generation of reactive species in argon/oxygen plasma driven by a pulsed microwave has been investigated using global simulation. The applied power was given for varying pulse periods and duties with a constant average power. The differences in the trends for species densities with regard to the pulse parameters are analyzed based on the timescales of individual species. The density of electrons in the pulse case is not linearly dependent on the instantaneous power density, which is explained by identifying the dominant loss and source of electrons. In a simulation with the continuous power as a reference, the densities of most of the reactive species increase with the power, as expected. A more realistic global simulation has also been developed by taking the time-varying plasma length into account, as observed in real experiments using a resonator type power source. The simulation shows that the use of pulsed power can increase the average power coupling efficiency by minimizing the duration of the impedance mismatch.
机译：通过全局模拟研究了由脉冲微波驱动的氩气/氧等离子体中的反应性物质的产生。施加的功率被赋予不同的脉冲周期和恒定平均功率的职责。基于个体种类的时间尺度分析了对脉冲参数的物种密度的趋势的差异。脉冲壳体中的电子密度不依赖于瞬时功率密度，通过识别电子的主要损耗和电子来源来解释。在作为参考的连续功率的模拟中，大多数反应物种的密度随着预期的功率而增加。也通过使用谐振器型电源在实际实验中观察到的时变等离子体长度来开发更现实的全局模拟。仿真表明，通过最小化阻抗失配的持续时间，使用脉冲功率可以通过最小化平均功率耦合效率。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号