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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Probing-models for interdigitated electrode systems with ferroelectric thin films
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Probing-models for interdigitated electrode systems with ferroelectric thin films

机译:铁电薄膜交叉电极系统的探测模型

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摘要

In this paper, a new method to characterize ferroelectric thin films with interdigitated electrodes is presented. To obtain accurate properties, all parasitic contributions should be subtracted from the measurement results and accurate models for the ferroelectric film are required. Hence, we introduce a phenomenological model for the parasitic capacitance. Moreover, two common analytical models based on conformal transformations are compared and used to calculate the capacitance and the electric field. With a thin film approximation, new simplified electric field and capacitance formulas are derived. By using these formulas, more consistent CV, PV and stress-field loops for samples with different geometries are obtained. In addition, an inhomogeneous distribution of the permittivity due to the nonuniform electric field is modelled by finite element simulation in an iterative way. We observed that this inhomogeneous distribution can be treated as a homogeneous one with an effective value of the permittivity.
机译:本文介绍了一种具有交叉电极的铁电薄膜的新方法。为了获得准确的性质,应从测量结果中减去所有寄生贡献,并且需要精确的铁电薄膜模型。因此,我们介绍了寄生电容的现象学模型。此外,比较了基于保形变换的两个常见的分析模型,并用于计算电容和电场。通过薄膜近似,推导出新的简化电场和电容式。通过使用这些公式,获得具有不同几何形状的样品的更一致的CV,PV和应力场环。此外,由于不均匀的电场引起的介电常数的不均匀分布是通过迭代方式的有限元模拟来建模的。我们观察到,这种不均匀的分布可以作为均匀的渗透度值被视为均匀的。

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