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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Zero-group-velocity acoustic waveguides for high-frequency resonators
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Zero-group-velocity acoustic waveguides for high-frequency resonators

机译：用于高频谐振器的零组速度声学波导

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The propagation of the Lamb-like modes along a silicon-on-insulator (SOI)/AlN thin supported structure was simulated in order to exploit the intrinsic zero group velocity (ZGV) features to design electroacoustic resonators that do not require metal strip gratings or suspended edges to confine the acoustic energy. The ZGV resonant conditions in the SOI/AlN composite plate, i.e. the frequencies where the mode group velocity vanishes while the phase velocity remains finite, were investigated in the frequency range from few hundreds of MHz up to 1900 MHz. Some ZGV points were found that show up mostly in low-order modes. The thermal behaviour of these points was studied in the -30 to 220 degrees C temperature range and the temperature coefficients of the ZGV resonant frequencies (TCF) were estimated. The behaviour of the ZGV resonators operating as gas sensors was studied under the hypothesis that the surface of the device is covered with a thin polyisobutylene (PIB) film able to selectively adsorb dichloromethane (CH2Cl2), trichloromethane (CHCl3), carbontetrachloride (CCl4), tetrachloroethylene (C2Cl4), and trichloroethylene (C2HCl3), at atmospheric pressure and room temperature. The sensor sensitivity to gas concentration in air was simulated for the first four ZGV points of the inhomogeneous plate. The feasibility of high-frequency, low TCF electroacoustic micro-resonator based on SOI and piezoelectric thin film technology was demonstrated by the present simulation study.
机译：模拟沿着绝缘体（SOI）/ ALN薄的支撑结构的羊肉状模式的传播，以利用固有的零群速度（ZGV）特征来设计不需要金属条光栅或的电声谐振器或悬挂边缘限制声能。 SOI / ALN复合板中的ZGV谐振条件，即模式组速度消失的频率在阶段速度仍然有限​​，在频率范围内，从几百MHz的频率范围内研究。发现一些ZGV积分，主要以低阶模式显示出来。在-30至220摄氏度中研究了这些点的热行为，估计ZGV谐振频率（TCF）的温度系数。在假设下研究了作为气体传感器的ZGV谐振器的行为在该假设下，用薄的聚异丁烯（PIB）膜覆盖，能够选择性地吸附二氯甲烷（CH 2 Cl 2），三氯甲烷（CHCL3），碳十四氯化碳（CCL4），四氯乙烯（C 2 Cl 4）和三氯乙烯（C2HCl3），在大气压和室温下。为不均匀板的前四个ZGV点模拟空气中气体浓度的传感器敏感性。基于SOI和压电薄膜技术的高频低TCF电声微谐振器的可行性是通过本发明的模拟研究证明的。

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