• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>RSC Advances >Recent advances in the mechanical and tribological properties of fluorine-containing DLC films
【24h】

Recent advances in the mechanical and tribological properties of fluorine-containing DLC films

机译：含氟DLC薄膜的机械和摩擦学性质的最新进展

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Fluorine easily substitutes hydrogen in DLC films due to its monovalence and high electronegativity. The peculiarities of fluorine bestow low surface energy, low inner stress, good thermal stability, preeminent tribological properties and biocompatibility on fluorine-containing, diamond-like carbon (F-DLC) films. Although there are some reviews that introduce the important advances in DLC films, they are not particularly focused on the promising F-DLC films. In this review, we mainly concentrate on the mechanical and tribological properties of F-DLC films. The mechanical properties, including hardness, modulus, and inner stress, will be discussed thoroughly. More importantly, the eminent tribological properties of F-DLC films would be emphasized based on the surface passivation and repulsive forces induced by fluorine atoms from the surface chemical and micro-mechanical viewpoints. Finally, some existing challenges and promising breakthroughs about F-DLC films are also proposed. It is expected that these films would be produced on a large scale and applied extensively in industrial applications such as micro-electro-mechanical systems, ultralarge scale integrated circuits, thin film transistor liquid crystal displays and biomedical devices.
机译：由于其单价和高电负负性，氟容易在DLC膜中替代氢。氟赋予低表面能，低内应力，良好的热稳定性，富含氟的金刚石状碳（F-DLC）膜上的富有效力性和生物相容性的氟。虽然有一些评论介绍了DLC薄膜的重要进步，但它们并不特别专注于有前途的F-DLC薄膜。在本综述中，我们主要集中在F-DLC薄膜的机械和摩擦学性质上。将彻底讨论机械性能，包括硬度，模量和内应力。更重要的是，基于来自表面化学和微机械观点的氟原子诱导的表面钝化和排斥力，将强调F-DLC膜的joincoloctics。最后，还提出了一些关于F-DLC薄膜的存在挑战和有希望的突破。预计这些薄膜将在大规模上生产，并在微电机​​系统，UltraRargarge集成电路，薄膜晶体管液晶显示器和生物医学装置等工业应用中进行广泛应用。

著录项

  • 来源
    《RSC Advances》 |2015年第13期|共15页
  • 作者

    Zhang Lifang; Wang Fuguo; Qiang Li; Gao Kaixiong; Zhang Bin; Zhang Junyan;

  • 作者单位

    Chinese Acad Sci Lanzhou Inst Chem Phys State Key Lab Solid Lubricat Lanzhou 730000 Peoples R China;

    Chinese Acad Sci Lanzhou Inst Chem Phys State Key Lab Solid Lubricat Lanzhou 730000 Peoples R China;

    Chinese Acad Sci Lanzhou Inst Chem Phys State Key Lab Solid Lubricat Lanzhou 730000 Peoples R China;

    Chinese Acad Sci Lanzhou Inst Chem Phys State Key Lab Solid Lubricat Lanzhou 730000 Peoples R China;

    Chinese Acad Sci Lanzhou Inst Chem Phys State Key Lab Solid Lubricat Lanzhou 730000 Peoples R China;

    Chinese Acad Sci Lanzhou Inst Chem Phys State Key Lab Solid Lubricat Lanzhou 730000 Peoples R China;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号