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Two Different Growth Mechanisms for Au-Free InAsSb Nanowires Growth on Si Substrate

机译:硅衬底上无金InAsSb纳米线生长的两种不同生长机理

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We present a study of Au-free InAsSb nanowire (NW) growth on Si (111) substrate under different growth parameters including V/III ratio, group Sb flow rate fraction (Sb-FRF, TMSb/(TMSb+AsH3)), and temperature. It was found that two different kinds of growth mechanisms for the Au-free InAsSb NW growth may be dominant depending on the growth parameters. At low V/III ratio and relatively high Sb-FRF, the NWs grow via vapor-liquid-solid (VLS) mode, while at high V/III ratio and relatively low Sb-FRF, they grow via vapor-solid (VS) mode. The NWs obtained by the two, growth modes show clear differences in morphology, growth direction, and crystal quality. Under VS mode, the NWs exhibit unified growth direction and a uniform composition distribution, which are beneficial to integration devices of multiple NWs. On the other hand, under VLS mode, the NWs are first reported with pure crystal phase, which will be useful for the development of single NW devices.
机译:我们提出了在不同生长参数(包括V / III比,组Sb流速分数(Sb-FRF,TMSb /(TMSb + AsH3))和不同生长参数下在Si(111)衬底上生长无金InAsSb纳米线(NW)的研究。温度。发现无金的InAsSb NW生长的两种不同的生长机理可能取决于生长参数。在低V / III比和相对较高Sb-FRF的情况下,NW通过汽-液-固(VLS)模式生长,而在高V / III比和相对较低Sb-FRF的情况下,它们通过气固(VS)增长。模式。通过两种生长模式获得的净重在形态,生长方向和晶体质量上显示出明显的差异。在VS模式下,NW呈现出统一的生长方向和均匀的成分分布,有利于多个NW的集成器件。另一方面,在VLS模式下,首先报告了纯晶体相的NW,这对于开发单个NW器件很有用。

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