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首页> 外文期刊>Crystal growth & design >Designing Various Self-Assembled ZnOx Quantum Dots/Islands on Silicon with Distinctive Characteristics by Magnetron Sputter
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Designing Various Self-Assembled ZnOx Quantum Dots/Islands on Silicon with Distinctive Characteristics by Magnetron Sputter

机译:磁控溅射在硅上设计具有独特特性的各种自组装ZnOx量子点/孤岛

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摘要

Three types of self-assembled ZnOx quantum dots (QDs) or islands oil silicon substrates with distinctive morphologies Were Successfully synthesized using various growth schemes in a simple magnetron Sputter. If hydrogen/argon was employed as the sputtering under negative substrate bias, the growth started from surface pit formation, leading to self-aligned cone shaped ZnOx QDs with composition, x, being linearly dependent on substrate bias, providing an ideal platform for defect engineering and related application. Intriguingly, if there is no substrate bias applied, the most energetically favorable ZnOx hexagonal pyramids were formed on the surface, in quasi-epitaxy with the Si substrate. Spherical stoichimetric ZnO QDs in a narrow size range were synthesized when oxygen was particularly introduced, and these exhibited true quantum confinement effects, evidenced by a blue shift of the UV emission in the photoluminescence Spectrum. This work facilitates the development of controllable ZnO QDs, and, most importantly, sheds light on the quick implantation of ZnO QDs into devices by an industrially compatible Sputter.
机译:在简单的磁控溅射中,使用各种生长方案成功合成了三种具有独特形态的自组装ZnOx量子点(QD)或岛状油硅衬底。如果在负衬底偏压下使用氢/氩气作为溅射材料,则生长从表面凹坑的形成开始,导致其成分x的自对准圆锥形ZnOx QD线性依赖于衬底偏压,从而为缺陷工程提供了理想的平台和相关的应用程序。有趣的是,如果没有施加衬底偏压,则在表面上会形成与Si衬底近似外延的能量最有利的ZnOx六角锥。当特别引入氧气时,可以合成出窄尺寸范围的球形化学计量ZnO QD,它们表现出了真正的量子限制效应,这可以通过光致发光光谱中UV发射的蓝移来证明。这项工作促进了可控ZnO QD的开发,最重要的是,阐明了通过工业兼容的溅射器将ZnO QD快速植入设备中的方法。

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