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首页> 外文期刊>Crystal growth & design >Crystal Phase Evolution in Quantum Confined ZnO Domains on Particles via Atomic Layer Deposition
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Crystal Phase Evolution in Quantum Confined ZnO Domains on Particles via Atomic Layer Deposition

机译：通过原子层沉积在粒子上的量子限制的ZnO域中的晶体相演化

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摘要

The evolution of the crystal phase of quantum confined polycrystalline ZnO films fabricated by atomic layer deposition (ALD) was studied on spherical particle surfaces. A statistical design of experiments was performed to quantify the crystallite size of the primary peaks associated with polycrystalline ZnO, as well as the change in bandgap associated with the small crystal domains. The factors of interest were the number of ALD cycles, the core particle size, and the use of postdeposition annealing temperatures up to 550 degrees C. The crystallite size of each peak increased almost linearly with the number of cycles, and was further increased via thermal annealing steps. The < 100 > dimension also increased more rapidly with temperature on smaller radius particles, signifying that grain boundary diffusion along the particle surfaces was facilitated with increased curvature. The shift in the optical bandgap of ZnO nanoshells was correlated to the domain size within the films at each point in the experimental matrix. The blue shift of 0.3 eV dissipated beyond crystallite sizes exceeding similar to 10 nm, which was indicative of the successful deposition of quantum confined nanostructures. The precision control afforded by ALD can be used to deposit quantum confined materials on substrates, independent of geometry and morphology.
机译：研究了在球形颗粒表面上通过原子层沉积（ALD）制备的量子约束多晶ZnO薄膜的晶相演变。进行了统计实验设计，以量化与多晶ZnO相关的主要峰的微晶尺寸，以及与小晶畴相关的带隙变化。感兴趣的因素是ALD循环数，核心颗粒大小以及使用沉积后退火温度（最高550摄氏度）。每个峰的微晶尺寸几乎随循环数线性增加，并通过热作用进一步增加退火步骤。 <100>尺寸也随着温度的升高在半径较小的粒子上更快地增加，这表明随着曲率的增加，沿粒子表面的晶界扩散得到了促进。 ZnO纳米壳的光学带隙的变化与实验矩阵中每个点处的膜内畴尺寸有关。 0.3 eV的蓝移消散超过超过10 nm的微晶尺寸，这表明成功地沉积了量子受限的纳米结构。 ALD提供的精度控制可用于将量子受限材料沉积在基板上，而与几何形状和形态无关。

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