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首页> 外文期刊>Micron: The international research and review journal for microscopy >Examination of focused ion beam-induced damage during platinum deposition in the near-surface region of an aerospace aluminum alloy
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Examination of focused ion beam-induced damage during platinum deposition in the near-surface region of an aerospace aluminum alloy

机译：在航空航天铝合金近表面区域中铂沉积期间聚焦离子束引起的损伤

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摘要

It is well known that damage induced by impinging Ga+ ions during focused ion beam (FIB) milling of transmission electron microscopy (TEM) specimens can obfuscate subsequent TEM characterization, especially in the near-surface region of the TEM foil. Numerous strategies for minimizing this damage have been invoked, with the most common being the deposition of a Pt 'strap' at the area of interest. However, damage can still occur in the near-surface region during this Pt deposition step and the variation in the character and extent of this damage with applied Pt deposition parameter, especially in complex structural alloys, is not well characterized. In this study, the damage induced in an aerospace Al alloy (AA7075-T651) during five different Pt deposition protocols is examined using TEM. Results indicate significant variations in damage character and depth amongst the applied Pt deposition protocols, with damage being effectively eliminated using a combined electron-beam/ion-beam Pt deposition strategy. These experimental results are found to be in good agreement with Monte Carlo-based simulations of ion implantation and the implications of these findings on recent experiments in the fracture mechanics community are explored.
机译：众所周知，通过在聚焦离子束（FIB）铣削期间通过撞击Ga +离子的抗透射电子显微镜（TEM）样本的损伤诱导的损坏可以混淆随后的TEM表征，尤其是在TEM箔的近表面区域中。已经调查了许多最大限度地减少这种损害的策略，最常见的是在感兴趣的地区沉积Pt'S表带。然而，在该PT沉积步骤期间，近表面区域仍然可能发生损坏，并且具有施加的PT沉积参数的这种损伤的特征和范围的变化，特别是在复杂的结构合金中，其特征在于。在该研究中，使用TEM检查在五种不同PT沉积方案期间在航空航天Al合金（AA7075-T651）中诱导的损伤。结果表明应用PT沉积方案中损伤特性和深度的显着变化，利用组合的电子束/离子束PT沉积策略有效地消除了损坏。探讨了这些实验结果与基于蒙特卡罗的离子植入模拟，探讨了这些发现对骨折力学界最近实验的影响。

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