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Modeling and simulation of a suspended microchannel resonator nano-sensor

机译：悬浮微通道谐振器纳米传感器的建模与仿真

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摘要

In this paper, dynamic behavior of a piezoelectric sensor based on the suspended microchannel resonator (SMR) was modelled and simulated. Dynamic behavior of SMR with optical and piezoelectric sensing was studied. Simulation was performed using two methods of distributed parameters model (DPM) and discontinuous beam model (DBM). Sensitivity of biosensor was analyzed for changing of added mass. Finally, an applicable case study was proposed. Simulation results showed that natural frequencies variation for optical and piezoelectric SMRs are equal to almost 11 kHz/(kg/m(3)) and 20 kHz/(kg/m(3)), respectively, and piezoelectric SMR is more sensitive for studied case study. In addition, 40 samples were generated randomly by using the Matlab software to study accuracy of the DPM and DBM analysis methods. Results showed that less proportional between the length of the microcantilever and piezoelectric layer, led to increase of the required number of Eigen functions to receive acceptable answer with DPM. Moreover, by increasing of the neutral axis displacement, the accuracy of DBM method decrease in comparison with DPM. In the piezoelectric SMR, the amplitude of output voltage declined more than ten times by using different fluids in channel of water instead of air.
机译：本文建模和模拟了基于悬浮微通道谐振器（SMR）的压电传感器的动态行为。研究了SMR与光学和压电感测的动态行为。使用两种分布式参数模型（DPM）和不连续光束模型（DBM）进行仿真。分析了生物传感器的敏感性以改变添加的质量。最后，提出了一个适用的案例研究。仿真结果表明，光学和压电SMR的固有频率变化分别等于近11kHz /（kg / m（3））和20kHz /（kg / m（3）），压电SMR更敏感案例分析。另外，通过使用MATLAB软件在DPM和DBM分析方法的准确性来研究40个样本。结果表明，微导流器和压电层的长度之间的比例较低，导致增加所需的eIGen函数以获得DPM可接受的答案。此外，通过增加中性轴位移，与DPM相比，DBM方法的准确性降低。在压电SMR中，通过在水通道中使用不同的流体而不是空气，输出电压的幅度下降了十多次。

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