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首页> 外文期刊>Crystallography reports >Electrophysical Characteristics and Structural Parameters of Metamorphic HEMT Nanoheterostructures In_(0.7)Al_(0.3)As/In_(0.7)Ga_(0.3)As/In_(0.7)Al_(0.3)As Containing Superlattices with Different Numbers of Periods in the Metamorphic Buffer
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Electrophysical Characteristics and Structural Parameters of Metamorphic HEMT Nanoheterostructures In_(0.7)Al_(0.3)As/In_(0.7)Ga_(0.3)As/In_(0.7)Al_(0.3)As Containing Superlattices with Different Numbers of Periods in the Metamorphic Buffer

机译:变质缓冲液中含有具有不同周期数的超晶格的变质HEMT纳米异质结构In_(0.7)Al_(0.3)As / In_(0.7)Ga_(0.3)As / In_(0.7)Al_(0.3)As的电物理特性和结构参数

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The results of studying the electrophysical characteristics and structural parameters of metamorphic In_(0.7)Al_(0.3)As/In_(0.7)Ga_(0.3)As/In_(0.7)Al_(0.3)As HEMT nanoheterostructures epitaxially grown on GaAs (100) substrates have been presented. A linear metamorphic buffer with inserted unbalanced superlattices characterized by different numbers of periods is used. Transmission electron microscopy has shown that an increase in the number of superlattice periods from 5 to 30 promotes the improvement of the crystal structure. In this case, the electrophysical parameters of metamorphic HEMT nanoheterostructures are also significantly improved.
机译:研究在GaAs(100)上外延生长的变质In_(0.7)Al_(0.3)As / In_(0.7)Ga_(0.3)As / In_(0.7)Al_(0.3)As HEMT纳米异质结构的电物理特性和结构参数的结果已经提出了底物。使用具有插入的不平衡超晶格的线性变态缓冲区,其特征是周期数不同。透射电子显微镜显示,超晶格周期数从5增加到30可促进晶体结构的改善。在这种情况下,变质HEMT纳米异质结构的电物理参数也得到了显着改善。

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