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A robust control approach for MEMS capacitive micromachined ultrasonic transducer

机译：MEMS电容微机械超声换能器的鲁棒控制方法

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摘要

An optimal composite nonlinear feedback control method with integral sliding mode is presented in this paper. The controller extends the travel range of the micro-electromechanical system capacitive micromachined ultrasonic transducer (CMUT). Moreover, enhanced transient response and precise tracking performance is achieved. It is known that CMUT is inherently unstable which results in pull-in phenomenon and it is very sensitive to small perturbations, so one of the major problems is to stabilize the CMUT beyond the pull-in limit with the external disturbances. In addition, the input saturation problem is significant to CMUT. Based on that, a robust control scheme is derived using composite nonlinear feedback control law combined with integral sliding mode control law. Then all the tuning parameters for the proposed control method are converted into a minimization problem and solved by particle swarm optimization algorithm automatically. We verified the effectiveness through extending the travel range of the CMUT gap by three control methods which are proportional integral derivative, composite nonlinear feedback and the method we proposed. The stability and small range tracking performance with three control methods is compared on the pull-in position of CMUT. The simulations show that the proposed control method has desired tracking performance and robustness to external disturbance with input saturation.
机译：本文提出了一种具有整体滑动模式的最佳复合非线性反馈控制方法。控制器扩展了微机电系统电容式微机械超声换能器（CMUT）的行进范围。此外，实现了增强的瞬态响应和精确的跟踪性能。众所周知，CMUT本质上是不稳定的，导致拉入现象，并且对小扰动非常敏感，因此主要问题之一是将CMUT稳定在外部干扰之外超出拉动限制。此外，输入饱和问题对CMUT很大。基于此，使用复合非线性反馈控制定律与整体滑动模式控制法相结合的鲁棒控制方案。然后，所提出的控制方法的所有调整参数都被转换为最小化问题，并自动通过粒子群优化算法解决。我们通过三种控制方法缩短了CMUT间隙的行程范围，通过三种控制方法验证了效果，这些方法是比例整体衍生物，复合非线性反馈和我们提出的方法。将三种控制方法的稳定性和小范围跟踪性能进行比较CMUT的拉入位置。模拟表明，所提出的控制方法对输入饱和度的外部干扰具有期望的跟踪性能和鲁棒性。

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