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首页> 外文期刊>Journal of computational and theoretical nanoscience >Design and Simulation Analysis of a Novel High Quality Factor Curvature Spring Micro Electronic Mechanical System Varactor
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Design and Simulation Analysis of a Novel High Quality Factor Curvature Spring Micro Electronic Mechanical System Varactor

机译:一种新型高品质因子曲率春季微型电子机械系统变容荷设计与仿真分析

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摘要

A new curvature spring with circular plate, Micro Electronic Mechanical system (MEMS) capacitor is presented for Radio frequency circuits (RF), MEMS Voltage Controlled Oscillators (VCOs), tuning circuits, and require voltage controlled variable capacitor (varactor). To achieve largetuning range, Quality factor, less stress and low phase noise, silver is used as the structural material with parallel plate electrode in circular shape mounted by two curvature spring. This paper presents the design and simulated results for a parallel plate circular shape with novel twocurvature spring Radio frequency (RF) MEMS capacitor for the applications such as VCOs and tuning circuits. The effect of quality factor, wide tuning range, withstand large voltage swings and stress with phase noise is investigated by comparing the simulated results of identical parallel platesquare shaped capacitor with four L-shaped spring. The designed capacitor utilizes small aperture ratio beams on the fixed plate to reduce the pull in voltage.
机译:具有圆形板的新型曲率弹簧,微型电子机械系统(MEMS)电容器用于射频电路(RF),MEMS电压控制振荡器(VCOS),调谐电路和需要电压控制可变电容器(变容二极管)。为了实现拉绳范围,质量因数,压力和低相位噪声,银用作具有由两个曲率弹簧安装的圆形形状的平行板电极的结构材料。本文介绍了具有新型双齿性弹簧射频(RF)MEMS电容器的平行板圆形的设计和模拟结果,用于诸如VCOS和调谐电路的应用。通过比较具有四个L形弹簧的相同平行的平板形状电容器的模拟结果,研究了质量因数,宽调谐范围,承受相位噪声的应力。设计的电容器利用固定板上的小孔径比光束,以减小拉动电压。

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