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首页> 外文期刊>Journal of Engineering & Applied Sciences >Design and Simulation of MEMS Type Cathodic Ray Generator
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Design and Simulation of MEMS Type Cathodic Ray Generator

机译：MEMS型阴极射线发电机的设计与仿真

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In this study is about the design and simulation of Hot Cathode Filament (HCF) for genesis of Cathode Ray (CR) at the MEMS scale. On the plan of this study nickel with a layer of oxide forms the cathode and is capable of emitting electrons with 50 nA current at the temperature of 750°C. Also, it is considered that the temperature is almost constant along the cathode and the emission of electrons is uniform in different parts. Furthermore, the cathode temperature is independent of the vacuum pressure. The grid voltage which provides the initial energy for electros is controllable providing the ability of turning the beam ON and OFF. It must be mentioned that the power consumption of the cathode is low (69.2 mW) and its dimensions are 2.5×1.5×0.5 mm. For the case of no target utilization, the energy of electrons reaches the value of 429 eV. On the design of this scheme the MEMS technology has been employed and the distance of anode network, height, thickness, number of the rods and other specifications of the anode to achieve the highest number and highest energy for the electrons have been determined by simulations carried out using COMSOL. In addition, the analysis of cathode temperature, cathode tension, electron movements, potential and electric field have been performed in this study.
机译：在本研究中，关于MEMS刻度的阴极射线（CR）的Genesis的热阴极丝（HCF）的设计和模拟。在该研究的计划中，具有一层氧化物的镍形成阴极，并且能够在750℃的温度下发射具有50个Na电流的电子。而且，认为温度沿阴极几乎恒定，并且在不同部件中的电子发射是均匀的。此外，阴极温度与真空压力无关。提供电动机初始能量的电网电压是可控的，提供打开和关闭光束的能力。必须提到的是，阴极的功耗低（69.2mW），其尺寸为2.5×1.5×0.5mm。对于无目标利用的情况，电子的能量达到429eV的值。在该方案的设计上，已经采用了MEMS技术，并通过仿真确定了阳极网络，高度，厚度，杆的杆和其他规格的其他规格的距离，以实现最高数量和最高能量。用comsol出来。此外，在本研究中已经进行了阴极温度，阴极张力，电子运动，电位和电场的分析。

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