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首页> 外文期刊>Journal of micro and nano manufacturing >A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning
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A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning

机译：一种计算机辅助设计和制造实现原子力显微镜尖端的三维图案化的纳米载方法

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摘要

This paper reports a feasibility study that demonstrates the implementation of a computer-aided design and manufacturing (CAD/CAM) approach for producing two-dimensional (2D) patterns on the nanoscale using the atomic force microscope (AFM) tip-based nanomachining process. To achieve this, simple software tools and neutral file formats were used. A G-code postprocessor was also developed to ensure that the controller of the AFM equipment utilized could interpret the G-code representation of tip path trajectories generated using the computer-aided manufacturing (CAM) software. In addition, the error between a machined pattern and its theoretical geometry was also evaluated. The analyzed pattern covered an area of 20 μm × 20 μm. The average machined error in this case was estimated to be 66 nm. This value corresponds to 15% of the average width of machined grooves. Such machining errors are most likely due to the flexible nature of AFM probe cantilevers. Overall, it is anticipated that such a CAD/CAM approach could contribute to the development of a more flexible and portable solution for a range of tip-based nanofabrication tasks, which would not be restricted to particular customised software or AFM instruments. In the case of nanomachining operations, however, further work is required first to generate trajectories, which can compensate for the observed machining errors.
机译：本文报告了一种可行性研究，证明了使用基于原子力显微镜（AFM）尖端的纳米机械加工过程在纳米级上产生二维（2D）模式的计算机辅助设计和制造（CAD / CAM）方法的可行性研究。为实现此目的，使用简单的软件工具和中性文件格式。还开发了G-Code后处理器，以确保所使用的AFM设备的控制器可以解释使用计算机辅助制造（CAM）软件产生的尖端路径轨迹的G代码表示。此外，还评估了加工模式与其理论几何形状之间的误差。分析的图案覆盖了20μm×20μm的面积。这种情况下的平均加工误差估计为66nm。该值对应于加工凹槽的平均宽度的15％。这种加工误差很可能是由于AFM探针悬臂的灵活性。总的来说，预计这种CAD / CAM方法可以为一系列基于尖端的纳米制造任务开发更灵活和便携式的解决方案，这不会限于特定的定制软件或AFM仪器。然而，在纳米加工操作的情况下，首先需要进一步的工作来产生轨迹，这可以补偿观察到的加工错误。

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