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首页> 外文期刊>Journal of Micromechanics and Microengineering >Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold
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Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold

机译：通过玻璃模塑与玻璃模塑玻璃模具的卓越化学和机械电阻的所有玻璃微流体装置的制造

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摘要

A glass microfluidic device with superior chemical and mechanical resistance was fabricated using a cost-effective glass molding process with a vitreous carbon (VC) mold, which was prepared by the carbonization of a replicated polymer precursor. For the development of microfluidic chips with dense microchannels on a large footprint, a defect-free VC mold is essential. In this study, a furan imprinting process, in which a patterned furan layer was imprinted (cured) on a polished furan plate, was established to minimize warpage and gas bubble defects. In addition, the proposed imprinting process markedly reduced the fabrication time of the furan precursor. For feasibility testing, a glass micromixer with a total channel length of 30.6 cm and footprint of 20 x 20 mm(2) was developed by glass molding with the VC mold and thermal fusion bonding. The fabricated glass-molded micromixer was durable at an internal pressure of similar to 24 MPa, and there was no swelling when used with toluene for an extended time.
机译：使用具有耐摩托碳（VC）模具的经济高效的玻璃模塑方法制造具有优异化学和机械电阻的玻璃微流体装置，通过碳化的聚合物前体制率制备。对于在大型占地面积上具有致密微通道的微流体芯片的开发，无缺陷的VC模具是必不可少的。在该研究中，建立了一种呋喃压印过程，其中图案化呋喃层在抛光的呋喃板上被印迹（固化），以最大限度地减少翘曲和气泡缺陷。此外，所提出的压印过程明显降低了呋喃前体的制备时间。对于可行性测试，通过玻璃模塑与VC模具和热熔粘合，通过玻璃模塑开发了总通道长度为30.6厘米的玻璃微混合器和20×20mm（2）的迹象。制造的玻璃模塑的微混合物在类似于24MPa的内部压力下耐用，并且当与甲苯一起使用时没有溶胀。

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