A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure

Li Dongsheng; Le Xianhao; Pang Jintao; Peng Li; Xu Zhen; Gao Chao; Xie Jin

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A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure

机译：基于钯纳米粒子在AIN / Si层叠结构上的钯氧化物装饰的锯氢传感器

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摘要

This work proposes a surface acoustic wave (SAW) hydrogen sensor based on the decoration of graphene oxide (GO) by palladium nanoparticles on AIN/Si layered structure. A thin decoration of GO by palladium nanoparticles layer is directly coated on the sensor surface as sensing layer. The SAW hydrogen sensor shows higher sensitivity (similar to 9.5 times) and lower cross-sensitivity towards NO2 compared to those based on GO only. The hydrogen sensor has good stability and fast response. The response time and recovery time are both 7 s. The frequency shift of the sensor with hydrogen concentration change is described by a fitting formula. Response mechanism is investigated based on complex impedance spectroscopy at various hydrogen concentration levels.

机译：这项工作提出了一种基于钯纳米颗粒在AIN / Si层状结构上的钯纳米颗粒装饰的表面声波（SAW）氢传感器。通过钯纳米粒子层的薄装饰是直接涂覆在传感器表面上的传感层。锯氢传感器显示出更高的灵敏度（类似于9.5次），与仅基于Go的那些相比，对NO2的交叉敏感性较低。氢传感器具有良好的稳定性和快速响应。响应时间和恢复时间都是7秒。通过配合式描述具有氢浓度变化的传感器的频移。基于各种氢浓度水平的复杂阻抗光谱研究了响应机理。

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来源
《Journal of Micromechanics and Microengineering》 |2019年第4期|共9页
作者
Li Dongsheng; Le Xianhao; Pang Jintao; Peng Li; Xu Zhen; Gao Chao; Xie Jin;
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作者单位

Zhejiang Univ Sate Key Lab Fluid Power &

Mechatron Syst Hangzhou 310027 Zhejiang Peoples R China;

Zhejiang Univ Sate Key Lab Fluid Power &

Mechatron Syst Hangzhou 310027 Zhejiang Peoples R China;

Zhejiang Univ Sate Key Lab Fluid Power &

Mechatron Syst Hangzhou 310027 Zhejiang Peoples R China;

Zhejiang Univ Dept Polymer Sci &

Engn MOE Key Lab Macromol Synth &

Functionalizat Hangzhou 310027 Zhejiang Peoples R China;

Zhejiang Univ Dept Polymer Sci &

Engn MOE Key Lab Macromol Synth &

Functionalizat Hangzhou 310027 Zhejiang Peoples R China;

Zhejiang Univ Dept Polymer Sci &

Engn MOE Key Lab Macromol Synth &

Functionalizat Hangzhou 310027 Zhejiang Peoples R China;

Zhejiang Univ Sate Key Lab Fluid Power &

Mechatron Syst Hangzhou 310027 Zhejiang Peoples R China;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
hydrogen sensor; surface acoustic wave; graphene oxide decoration; palladium nanoparticles; AIN thin film; response mechanism;

机译：氢传感器;表面声波;石墨烯氧化物装饰;钯纳米颗粒;AIN薄膜;响应机制;

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专利

1. A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure [J] . Li Dongsheng, Le Xianhao, Pang Jintao, Journal of Micromechanics and Microengineering . 2019,第4期

机译：基于钯纳米粒子在AIN / Si层叠结构上的钯氧化物装饰的锯氢传感器
2. A non-enzymatic hydrogen peroxide sensor based on dendrimer functionalized magnetic graphene oxide decorated with palladium nanoparticles [J] . Baghayeri Mehdi, Alinezhad Heshmatollah, Tarahomi Mehrasa, Applied Surface Science . 2019,第JUNa1期

机译：基于树枝状聚合物官能化的氧化石墨烯的非酶促双氧水传感器，修饰有钯纳米颗粒
3. A non-enzymatic hydrogen peroxide sensor based on dendrimer functionalized magnetic graphene oxide decorated with palladium nanoparticles [J] . Baghayeri Mehdi, Alinezhad Heshmatollah, Tarahomi Mehrasa, Applied Surface Science . 2019,第Juna1期

机译：基于树突官能化磁性石墨烯的非酶促过氧化氢传感器用钯纳米粒子装饰
4. A Highly Sensitive Non-Enzymatic Hydrogen Peroxide Sensor based on Palladium-Gold Nanoparticles [C] . Saikat Banerjee, Md Faruk Hossain, Gymama Slaughter IEEE International Conference on Nano/Micro Engineered and Molecular Systems . 2020

机译：基于钯金纳米颗粒的高敏感的非酶过氧化氢传感器
5. Chemiresistive hydrogen sensors using gold palladium and silver palladium hexanethiolate coated alloy monolayer-protected clusters [D] . Parrino, Joseph 2008

机译：化学式氢传感器，使用己二酸金钯和钯钯涂覆的合金单层保护簇
6. Simultaneous Detection of Ascorbic Acid Dopamine and Uric Acid Using a Novel Electrochemical Sensor Based on Palladium Nanoparticles/Reduced Graphene Oxide Nanocomposite [O] . Yuyun Wei, Yangyang Liu, Zhifang Xu, 2020

机译：基于钯纳米粒子/氧化石墨烯纳米复合材料的新型电化学传感器同时检测抗坏血酸多巴胺和尿酸
7. Palladium nanoparticle-decorated multi-layer Ti3C2Tx dual-functioning as a highly sensitive hydrogen gas sensor and hydrogen storage [O] . Thanh Hoang Phuong Doan, Won G. Hong, Jin-Seo Noh 2021

机译：钯纳米粒子装饰的多层TI3C2TX双功能作为高敏感的氢气传感器和储氢

A SAW hydrogen sensor based on decoration of graphene oxide by palladium nanoparticles on AIN/Si layered structure

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