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首页> 外文期刊>Journal of Micromechanics and Microengineering >Effect of mode order, resonator length, curvature, and electrode coverage on enhancing the performance of biconvex resonators
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Effect of mode order, resonator length, curvature, and electrode coverage on enhancing the performance of biconvex resonators

机译：模式顺序，谐振器长度，曲率和电极覆盖对增强Biconvex谐振器性能的影响

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摘要

Previous work has demonstrated the effectiveness of the biconvex approach in enhancing the quality factor of piezoelectric resonators. This paper explores biconvex resonators in more detail. The first of these considerations include modifying the resonator geometry when extending the mode order to reduce the motional series resistance. Results for applying various curvatures are described to illustrate the effect of resonator length in providing the possibility to reliably enhance quality factor through an optimal range of curvatures. The drawbacks of over-curving biconvex resonators are also elucidated herein. This paper further describes the effect of the electrode geometry (by varying the area coverage and the number of interdigitated transducer electrodes) in the limit where anchor losses in the biconvex resonators have been reduced to the point such that electrode-related losses have a measurable effect.
机译：以前的工作表明了Biconvex方法在提高压电谐振器的质量因子方面的有效性。 本文更详细地探讨了Biconvex谐振器。 这些考虑中的第一个包括在扩展模式顺序时修改谐振器几何体以降低运动串联电阻。 描述用于施加各种曲率的结果，以说明谐振器长度在提供通过最佳曲率范围可靠地增强质量因子的可能性。 本文还阐明了过弯曲的Biconvex谐振器的缺点。 本文进一步描述了电极几何形状的影响（通过改变面积覆盖和互通的换能器电极的数量）在Biconvex谐振器中已经减少到诸如电极相关损失具有可测量的效果的点的极限中 。

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