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首页> 外文期刊>Journal of Micromechanics and Microengineering >Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode
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Position-dependent mass responsivity of silicon MEMS cantilevers excited in the fundamental, two-dimensional roof tile-shaped mode

机译：硅MEMS悬臂的位置依赖质量响应器在基本，二维瓦片形模式中激发

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摘要

The potential of a special class of eigenmodes of microcantilevers, the so-called roof tile-shaped modes, is investigated for resonant mass sensing. Due to the 2D shape of vibration, the mass responsivity (resonance frequency shift per unit mass change) of these modes depends on the position along the length and width of the cantilever. This is in contrast to the commonly used ID eigenmodes, where the mass responsivity is only dependent on one spatial variable. We mapped the position-dependent mass responsivity of the fundamental roof tile-shaped mode by placing silicon dioxide microbeads as test mass on defined positions across the cantilever surface and measuring the corresponding shift in resonance frequency. The results show very good agreement with finite element analyses and are used to verify an analytic expression for the position-dependent mass responsivity. This expression allows for the calculation of the mass responsivity of an arbitrary point on the cantilever surface. A mass responsivity of 24 Hz ng(-1)was found at the point of maximum oscillation amplitude at the free end of the cantilever, which rapidly decreases towards the nodal lines of the vibration. The 2D spatial distribution of the mass responsivity is discussed in this paper, which has to be considered in the design of high precision resonant mass sensors when targeting the roof tile-shaped mode. Since the accuracy in mass determination relies on the precise knowledge of the added mass position, the maximum error due to limited spatial accuracy is determined and the mid-section of the free end is identified to be the most suitable position on the cantilever surface for mass detection.
机译：针对谐振质量感测，研究了微型膜片的特殊类别的微电胞膜设计模式的潜力。由于2D的振动形状，这些模式的质量响应度（每单位质量变化的谐振频移）取决于沿悬臂的长度和宽度的位置。这与常用的ID特征模型相反，其中质量响应度仅取决于一个空间变量。我们通过将二氧化硅微珠作为测试质量放置在悬臂表面上的限定位置上并测量共振频率的相应变换来映射基本瓦片形模式的位置依赖性质量响应度。结果表现出与有限元分析非常好的一致性，并用于验证位置依赖性质量响应度的分析表达。该表达允许计算悬臂表面上任意点的质量响应度。在悬臂的自由端的最大振荡点处发现24Hz NG（-1）的质量响应度，这朝向振动的节点迅速降低。本文讨论了质量响应率的2D空间分布，其在瞄准屋顶瓦片形模式时必须考虑在高精度谐振质量传感器的设计中。由于质量确定的精度依赖于所添加质量位置的精确知识，因此确定了由于空间精度有限的最大误差，并且自由端的中间部分被识别为质量悬臂表面上最合适的位置检测。

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