CMUT with mechanically coupled plate actuators for low frequencies

Krenkel Marcel; Stolz Michael; Koch Sandro G.; Kupnik Mario

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CMUT with mechanically coupled plate actuators for low frequencies

机译：CMUT与机械耦合板致动器，用于低频

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In this paper we present a structural analytical model for a capacitive micromachined ultrasonic transducer (CMUT), based on a sacrificial release fabrication process and comprised of electro-mechanical plate actuators transferring their motion to a coupling roof structure on top. The structure features a larger average displacement compared to conventional designs at lower operational frequencies.

机译：本文基于牺牲释放制造工艺，介绍了一种用于电容式微机械超声换能器（CMUT）的结构分析模型，并且由电动机械板致动器组成，将它们的运动转移到顶部的联轴器屋顶结构上。与较低操作频率的传统设计相比，该结构具有更大的平均位移。

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来源
《Journal of Micromechanics and Microengineering》 |2019年第4期|共11页
作者
Krenkel Marcel; Stolz Michael; Koch Sandro G.; Kupnik Mario;
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作者单位

Fraunhofer IPMS Maria Reiche Str 2 D-01109 Dresden Germany;

Fraunhofer IPMS Maria Reiche Str 2 D-01109 Dresden Germany;

Fraunhofer IPMS Maria Reiche Str 2 D-01109 Dresden Germany;

Tech Univ Darmstadt Measurement &

Sensor Technol Merckstr 25 D-64283 Darmstadt Germany;

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原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
CMUT; MEMS; ultrasound transducer; mechanical coupling; analytical modeling;

机译：CMUT;MEMS;超声换能器;机械耦合;分析建模;

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专利

1. CMUT with mechanically coupled plate actuators for low frequencies [J] . Krenkel Marcel, Stolz Michael, Koch Sandro G., Journal of Micromechanics and Microengineering . 2019,第4期

机译：CMUT与机械耦合板致动器，用于低频
2. Vibration attenuation and dynamic control of piezolaminated plates with coupled electromechanical actuation [J] . Wankhade Rajan L., Bajoria K. M. Archive of Applied Mechanics . 2021,第1期

机译：耦合机电致动的压扎板振动衰减与动态控制
3. Fully coupled electromechanical buckling analysis of active laminated composite plates considering stored voltage in actuators [J] . Danial Panahandeh-Shahraki, Hamid Reza Mirdamadi, Omid Vaseghi Composite Structures . 2014,第deca期

机译：考虑执行器中存储电压的有源层压复合板的全耦合机电屈曲分析
4. Modeling and validation of CMUTs with mechanically coupled plate actuators [C] . Marcel Krenkel, Nicolas Lange, Sandro G. Koch, IEEE International Ultrasonics Symposium . 2020

机译：机械耦合板式执行器对CMUT的建模和验证
5. Experimental characterization and modeling of electro-mechanically coupled ferroelectric actuators. [D] . York, Alexander. 2008

机译：机电耦合铁电致动器的实验表征和建模。
6. Low frequency mechanical actuation accelerates reperfusion in-vitro [O] . Marcin Marzencki, Behrad Kajbafzadeh, Farzad Khosrow-khavar, 2013

机译：低频机械驱动可加速体外再灌注
7. Modelling Bending Wave Transmission across Coupled Plate Systems Comprising Periodic Ribbed Plates in the Low-, Mid-, and High-Frequency Ranges Using Forms of Statistical Energy Analysis [O] . Yin J, Hopkins C 2015

机译：使用统计能量分析的形式，对低频，中频和高频范围内包含周期性肋板的耦合板系统之间的弯曲波传输进行建模
8. Mobility Power Flow Analysis of Coupled Plate Structure Subjected to Mechanicaland Acoustic Excitation [R] . Cuschieri, J. M. 1992

机译：机械声激励下耦合板结构的迁移功率流分析

CMUT with mechanically coupled plate actuators for low frequencies

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