Effective Sputtering Yields of Titanium, Titanium Nitride, and Molybdenum Induced by Nitrogen Ions and Ions of Nitrogen-Oxygen Mixtures

D. V. Dukhopelnikov; V. A. Riazanov; E. V. Vorobev; V. K. Abgarian; G. A. Popov; S. A. Khartov

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Effective Sputtering Yields of Titanium, Titanium Nitride, and Molybdenum Induced by Nitrogen Ions and Ions of Nitrogen-Oxygen Mixtures

机译：用氮离子和氮氧混合物的离子诱导的钛，氮化钛和钼的有效溅射产率

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This work is dedicated to studying the effects of nitrogen ions and ions of nitrogen and oxygen mixtures on the surface of titanium, titanium nitride, and molybdenum. The usage of magnetron sputtering systems as a model device to study the effect of reactive gases on elements of electric jet engines is proposed and justified. The processes of sputtering of a surface exposed to non-monoenergetic ion beams are studied. The effective sputtering yields of titanium, titanium nitride, and molybdenum induced by argon and nitrogen ions and ions of nitrogen-oxygen mixtures at various intermediate-energy ion beams are determined. It is shown that the sputtering yields of reactive-gas ions are significantly lower than the sputtering yields of inert gases.

机译：这项工作致力于研究氮离子和离子的氮和离子在钛，氮化钛和钼表面上的影响。提出了磁控溅射系统作为研究反应气体对电气喷射发动机元件的效果的模型装置的用途。研究了暴露于非单元束离子束的表面的溅射过程。确定了由氩气和氮离子诱导的钛，氮化钛和钼的有效溅射产率和各种中间能离子束处的氮氧混合物的离子。结果表明，反应性 - 气体离子的溅射产率显着低于惰性气体的溅射产率。

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来源
《Journal of surface investigation: x-ray, synchrotron and neutron techniques》 |2016年第6期|共6页
作者
D. V. Dukhopelnikov; V. A. Riazanov; E. V. Vorobev; V. K. Abgarian; G. A. Popov; S. A. Khartov;
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作者单位

Bauman Moscow State Technical University Moscow 105005 Russia;

Bauman Moscow State Technical University Moscow 105005 Russia;

Bauman Moscow State Technical University Moscow 105005 Russia;

Research Institute of Applied Mechanics and Electrodynamics Moscow Aviation Institute (National Research University) Moscow 125993 Russia;

Research Institute of Applied Mechanics and Electrodynamics Moscow Aviation Institute (National Research University) Moscow 125993 Russia;

Research Institute of Applied Mechanics and Electrodynamics Moscow Aviation Institute (National Research University) Moscow 125993 Russia;

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正文语种 eng
中图分类原子核物理学、高能物理学;
关键词
sputtering yields; electric jet engines; reactive sputtering; ion beams; surface topology;

机译：溅射产量;电气喷射发动机;反应溅射;离子束;表面拓扑;

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1. Effective Sputtering Yields of Titanium, Titanium Nitride, and Molybdenum Induced by Nitrogen Ions and Ions of Nitrogen-Oxygen Mixtures [J] . D. V. Dukhopelnikov, V. A. Riazanov, E. V. Vorobev, Journal of surface investigation: x-ray, synchrotron and neutron techniques . 2016,第6期

机译：用氮离子和氮氧混合物的离子诱导的钛，氮化钛和钼的有效溅射产率
2. Nitriding Behavior of Titanium Sponge Studied using Nitrogen Gas and Dissolution Behavior of a Titanium Nitride Sponge in Titanium Alloy Melt [J] . Hideo Mizukami, Tomoyuki Kitaura, Yoshihisa Shirai ISIJ international . 2019,第1期

机译：氮气研究钛海绵的渗氮行为及氮化钛海绵在钛合金熔体中的溶解行为
3. A comparative study of the corrosion performance of titanium (Ti), titanium nitride (TiN), titanium dioxide (TiO2) and nitrogen-doped titanium oxides (N-TiO2), as coatings for biomedical applications [J] . Wang Hefeng, Zhang Rui, Yuan Zhi, CERAMICS INTERNATIONAL . 2015,第9aPta2期

机译：钛（Ti），氮化钛（TiN），二氧化钛（TiO2）和氮掺杂的二氧化钛（N-TiO2）作为生物医学应用涂层的腐蚀性能的比较研究
4. Titanium, Titanium Nitride, Copper and Molybdenum Persistence Under Exposure to Ion Flow Nitrogen-Oxygen Mixture [C] . D.V. Duhopelnikov, V.A. Ryazanov, S.O. Shilov Academic Space Conference . 2019

机译：暴露于离子流氮气混合物的钛，氮化钛，铜和钼持久性
5. Wide Tunability of Magnetron Sputtered Titanium Nitride and Titanium Oxynitride for Plasmonic Applications [D] . Zgrabik, Christine Michelle. 2016

机译：磁控溅射氮化钛和氧氮化钛的宽可调性，适用于等离子应用
6. Combustion of Titanium–Carbon Black High-Energy Ball-Milled Mixtures in Nitrogen: Formation of Titanium Carbonitrides at Atmospheric Pressure [O] . Michail A. Korchagin, Dina V. Dudina, Alexander I. Gavrilov, 2020

机译：氮气中钛碳黑高能球磨混合物的燃烧：大气压下碳氮化钛的形成
7. Nitriding Behavior of Titanium Sponge Studied using Nitrogen Gas and Dissolution Behavior of a Titanium Nitride Sponge in Titanium Alloy Melt [O] . Hideo Mizukami, Tomoyuki Kitaura, Yoshihisa Shirai 2019

机译：利用氮气和钛氮化钛海绵溶出行为研究钛海绵的氮化行为
8. Formation and Characterization of Titanium Nitride and Titanium Carbide Films Prepared by Reactive Sputtering [R] . Sundgren, J. E. 1982

机译：反应溅射制备氮化钛和碳化钛薄膜的形成与表征

Effective Sputtering Yields of Titanium, Titanium Nitride, and Molybdenum Induced by Nitrogen Ions and Ions of Nitrogen-Oxygen Mixtures

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