Development of Materials and New Methods of Forming of Defectless and Corrosion Resistant Metallization of the Large-Scale Integrated Circuits

S.P.Novosyadly

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Development of Materials and New Methods of Forming of Defectless and Corrosion Resistant Metallization of the Large-Scale Integrated Circuits

机译：大规模集成电路的缺陷和耐腐蚀金属化材料的研制和新方法

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Salient features of corrosion damage of aluminiummetallization of large-scale integrated (LSI) circuits areexperimentally and theoretically studied. It is shown that a processof corrosion attack slows down and stops by the introduction ofrare-earth metals into the aluminium alloy or by the ion-implantation modification of its surface. On basis of investigations,new materials and methods of non-corrosive metallization of LSIcircuits are elaborated.

机译：大规模集成（LSI）电路铝合金化腐蚀损伤的凸起特征及理论研究。结果表明，腐蚀攻击的过程减慢并通过将地球金属引入铝合金或通过其表面的离子植入改性来停止。在研究的基础上，详细阐述了Lsicircuits的非腐蚀金属化的新材料和方法。

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《Металлофизка　и　новейшие　технологии(на укр., рус. и анг. языках)》 |2000年第1期|共9页
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S.P.Novosyadly;
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中图分类金属学与热处理;
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1. Development of Materials and New Methods of Forming of Defectless and Corrosion Resistant Metallization of the Large-Scale Integrated Circuits [J] . S.P.Novosyadly Металлофизка　и　новейшие　технологии(на укр., рус. и анг. языках) . 2000,第1期

机译：大规模集成电路的缺陷和耐腐蚀金属化材料的研制和新方法
2. Iron-Based Amorphous Metals: High-Performance Corrosion-Resistant Material Development [J] . Joseph Farmer, Jor-Shan Choi, Cheng Saw, Metallurgical and Materials Transactions A . 2009,第6期

机译：铁基非晶态金属：高性能耐腐蚀材料开发
3. Iron-Based Amorphous Metals: High-Performance Corrosion-Resistant Material Development [J] . JOSEPH FARMER, JOR-SHAN CHOI, CHENG SAW Metallurgical and Materials Transactions, A. Physical Metallurgy and Materials Science . 2009,第6期

机译：铁基非晶态金属：高性能耐腐蚀材料开发
4. Iron-Based Amorphous Metals: The High Performance Corrosion Resistant Materials (HPCRM) Program [C] . J. Farmer Materials Science Technology Conference and Exhibition . 2007

机译：铁基无定形金属：高性能耐腐蚀材料（HPCRM）计划
5. Time-domain finite-element reduction-recovery methods for large-scale electromagnetics-based analysis and design of next-generation integrated circuits [D] . Gan, Houle 2010

机译：基于时域有限元缩减-恢复方法的大规模基于电磁学的下一代集成电路分析与设计
6. Measuring corrosion rate and protector effectiveness of advanced multilayer metallic materials by newly developed methods [O] . Vladimir A. Grachev, Andrey E. Rozen, Yuri P. Perelygin, 2018

机译：通过新开发的方法测量高级多层金属材料的腐蚀速率和保护剂有效性
7. Corrosion and Heat Resistant Materials. The Development of a New Forming Method for the Near Net Shaped Ring of Titanium Alloys and Superalloys. [O] . Junichi Esaki, Kyouji Isizuka, Yuji Kato, 1996

机译：腐蚀和耐热材料。钛合金近净形环近净形环的新成形方法的发展。
8. Iron-Based Amorphous-Metals: High-Performance Corrosion-Resistant Materials (HPCRM) Development Final Report [R] . Farmer, J. C., Choi, J., Saw, C., 2009

机译：铁基非晶态金属：高性能耐腐蚀材料（HpCRm）开发最终报告

Development of Materials and New Methods of Forming of Defectless and Corrosion Resistant Metallization of the Large-Scale Integrated Circuits

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