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首页> 外文期刊>Carbon: An International Journal Sponsored by the American Carbon Society >Effective surface emissivity and heat dissipation among integrated bamboo-like super-black vertical carbon nanotube array electrodes in silicon via holes
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Effective surface emissivity and heat dissipation among integrated bamboo-like super-black vertical carbon nanotube array electrodes in silicon via holes

机译：通过孔硅的集成竹状超黑色垂直碳纳米管阵列电极的有效表面发射率和散热

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摘要

Recently, carbon nanotube (CNT)-based micro-devices have attracted extensive attention at the frontiers of intelligent electronics, but the practical application of these devices are seriously limited by the low CNT package rates, poor heat dissipation, and intricate in-situ growth processes. Here, microelectrodes with low impedance based on in-situ-grown super-black vertical bamboo-like multi-walled CNT arrays (similar to 70 mu m) were fabricated inside silicon via holes using face-down catalytic plasma enhanced chemical vapor deposition. Interestingly, the unique CNT array exhibited uniformly high absorption efficiency with a broad range of wavelength (exceeding 99.65% in the UV-NIR band and 99% in the mid-infrared region). Moreover, the excellent cooling performance of CNT array microelectrodes based on in-situ-grown bamboo-like CNT arrays within silicon via holes was demonstrated. Our study highlights the benefits of CNT-based micro functional devices, which indicates the integrated in-situ-grown bamboo-like CNT arrays will have potential applications in advanced microelectrodes, CNT-based field-effect transistors, and portable terahertz inspection devices. (C) 2019 Elsevier Ltd. All rights reserved.
机译：最近，基于碳纳米管（CNT）的微型器件在智能电子设备的前沿引起了广泛的关注，但这些器件的实际应用受到低CNT封装率，散热不良和错综复杂的原位增长的严重限制流程。这里，基于原位生长的超黑色垂直竹状的多壁CNT阵列（类似于70μm）的微电极在硅通孔中使用面部下降催化等离子体增强的化学气相沉积来制造硅通孔内。有趣的是，独特的CNT阵列具有均匀的高吸收效率，波长范围的波长（UV-NIR带中超过99.65％，中红外区域99％）。此外，证明了基于原位生长的竹状CNT阵列的CNT阵列微电极的优异冷却性能。我们的研究突出了基于CNT的微功能器件的好处，它表示集成的原位生长的竹子样CNT阵列将具有高级微电极，基于CNT的场效应晶体管和便携式太赫兹检测装置的潜在应用。 （c）2019年elestvier有限公司保留所有权利。

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