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Measurement of absolute displacement by a double-modulation technique based on a Michelson interferometer

机译:基于迈克尔逊干涉仪的双调制技术测量绝对位移

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摘要

A novel method is presented for of measuring absolute displacement with a synthesized wavelength interferometer. The optical phase of the interferometer is simultaneously modulated with a frequency-modulated laser diode and optical path-length difference. The error signal originating from the intensity modulation of the source is eliminated by a signal processing circuit. In addition, a lock-in technique is used to demodulate the envelope of the interferometric signal. The displacement signal is derived by the self-mixing technique.
机译:提出了一种利用合成波长干涉仪测量绝对位移的新方法。干涉仪的光学相位同时通过调频激光二极管和光程长度差进行调制。由信号源的强度调制产生的误差信号被信号处理电路消除。另外,使用锁定技术来解调干涉信号的包络。位移信号通过自混合技术得出。

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