Acrylate-based optical waveguides have been fabricated with optical loss of 0.5 dB/cm at 1300 nm by means of a new material system that ensures stable optical and mechanical properties over a wide temperature range, No increase in loss was measured after 500 h at temperatures up to 150 degrees C, and there was no significant increase in loss during short (<5 min) temperature excursions to 300 degrees C for bonding. Single-mode waveguides were fabricated with refractive indices for core and clad of 1.505 and 1.500, respectively, so that the mode field is very similar to that of single-mode silica fiber. Guides were fabricated on both planar and structured substrates of Si and GaAs as well as on substrates coated with metals and dielectrics. Fabrication involved spin coating and UV exposure to cross-link, the polymer, but the substrate temperature did not exceed 180 degrees C. With this method guides could be fabricated on a range of substrates up to 125 cm in diameter, including those with multilayer metallization for multichip modules, providing optical interconnect capability. Microprism reflecting surfaces were fabricated in the waveguides to couple light out normal to the substrate. AU the processing tvas compatible with normal semiconductor fabrication. (C) 1998 Optical Society of America. [References: 57]
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机译：通过一种新的材料系统，制造了丙烯酸酯基光波导，该光波导在1300 nm下的光损耗为0.5 dB / cm，可确保在较宽的温度范围内保持稳定的光学和机械性能，在此温度下500 h后未发现损耗增加最高温度可达150摄氏度，并且在短时间（<5分钟）温度波动至300摄氏度进行粘合时，损耗没有明显增加。制造的单模波导的纤芯和包层折射率分别为1.505和1.500，因此模场与单模石英光纤的模场非常相似。在Si和GaAs的平面和结构化衬底以及涂有金属和电介质的衬底上制作了导向器。制作过程涉及旋涂和将紫外线暴露于聚合物的交联下，但基板温度不超过180摄氏度。采用这种方法，可以在直径最大为125 cm的一系列基板上制作导板，包括具有多层金属化工艺的基板用于多芯片模块，提供光学互连功能。在波导中制造了微棱镜反射表面，以将垂直于基板的光耦合出。所有的加工都与常规半导体制造兼容。 （C）1998年美国眼镜学会。 [参考：57]
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