High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma

Airoldi VT; Borges CFM; Moisan M; Guay D; UNIV QUEBEC INST NATL RECH SCI ENERGIE amp; MAT VARENNES PQ J3X 1S2 CANADA.

首页> 外文期刊>Applied optics >High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma

【24h】

High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma

机译：具有表面波持续等离子体的熔融石英窗口上沉积的金刚石膜的高光学透明度和良好的附着力

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

We utilized a microwave plasma reactor based on a surface-wave-sustained discharge for uniform coating of fused silica windows with polycrystalline diamond films. Grain size and average roughness as small as 30 and 2.2 nm, respectively, were obtained, resulting in a uniform loss of transparency of only 10% over the 190-800-nm band for as-deposited 1.5-mu m-thick coatings. A pretreatment procedure provides a film coating with a surface resistance to scratching that is approximately a factor of 2 higher than that of bare fused silica. (C) 1997 Optical Society of America.

机译：我们利用基于表面波维持放电的微波等离子体反应器，用多晶金刚石膜均匀地涂覆熔融石英窗口。获得的晶粒尺寸和平均粗糙度分别小至30和2.2 nm，对于沉积的1.5微米厚涂层，在190-800 nm波段上，透明性的均匀损失仅为10％。预处理程序可提供一种膜涂层，该膜涂层的耐刮擦性比裸熔融石英高约2倍。（C）1997年美国眼镜学会。

著录项

来源
《Applied optics》 |1997年第19期|共3页
作者
Airoldi VT; Borges CFM; Moisan M; Guay D; UNIV QUEBEC INST NATL RECH SCI ENERGIE amp; MAT VARENNES PQ J3X 1S2 CANADA.;
展开▼
作者单位

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类光学;
关键词
diamond; optical coating; microwave plasma chemical vapor deposition; surface-wave plasma;

机译：金刚石;光学涂层;微波等离子体化学气相沉积;表面波等离子体;

相似文献

外文文献
中文文献
专利

1. High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma [J] . Airoldi VT, Borges CFM, Moisan M, Applied optics . 1997,第19期

机译：具有表面波持续等离子体的熔融石英窗口上沉积的金刚石膜的高光学透明度和良好的附着力
2. Catalytic effects of ferrocene on bonding, optical and structural properties of diamond-like carbon films deposited by microwave surface-wave plasma chemical vapor deposition [J] . Adhikari S, Adhikary S, Uchida H, Surface review and letters . 2006,第6期

机译：二茂铁对微波表面波等离子体化学气相沉积法沉积类金刚石碳膜的键合，光学和结构性能的催化作用
3. Optical and electrical properties of boron doped diamond thin conductive films deposited on fused silica glass substrates [J] . Ficek M., Sobaszek M., Gnyba M., Applied Surface Science . 2016,第nova30期

机译：沉积在熔融石英玻璃基板上的掺硼金刚石薄膜导电膜的光学和电学性质
4. EFFECT OF DEPOSITING TEMPERATURE ON THE INTERFACIAL ADHESION OF NANOCRYSTALLINE DIAMOND FILMS GROWN ON TITANIUM BY MICROWAVE PLASMA ASSISTED CVD PROCESS [C] . SYED JAWID ASKARI, ALI IMRAN MERCHANT 第五届先进材料与加工国际会议(Fifth International Conference on Advanced Materials and Processing ICAMP-5)论文集 . 2009

机译：沉积温度对微波等离子体CVD工艺在钛上生长纳米晶金刚石膜界面粘附的影响
5. Interface modifications to influence the adhesion of chemical vapor deposited diamond thin films. [D] . Sizemore, Jim. 1996

机译：界面改性会影响化学气相沉积金刚石薄膜的附着力。
6. Ultra-Smooth Nanostructured Diamond Films Deposited from He/H2/CH4/N2 Microwave Plasmas [O] . Valery V. Konovalov, Andrew Melo, Shane A. Catledge, -1

机译：从He / H2 / CH4 / N2微波等离子体沉积超光滑纳米结构金刚石薄膜
7. Optical and structural properties of polycrystalline CVD diamond films grown on fused silica optical fibres pre-treated by high-power sonication seeding [O] . 2014

机译：在高功率超声种子预处理下的熔融石英光纤上生长的多晶CVD金刚石膜的光学和结构特性
8. Mechanical Protection of DLC (Diamond Like Carbon) Films on Fused Silica Slides [R] . Nir, D. 1985

机译：熔融石英载玻片上DLC（类金刚石碳）薄膜的机械保护

High optical transparency and good adhesion of diamond films deposited on fused silica windows with a surface-wave sustained plasma

摘要

著录项

相似文献

相关主题

期刊订阅