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Wavelength scanning profilometry for real-time surface shape measurement

机译：波长扫描轮廓仪用于实时表面形状测量

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摘要

Wavelength scanning profilometry suitable for real-time surface shape measurement is proposed. A phase slope of the interference signal generated by a wavelength scan is measured at an individual image pixel on-line. The parallel outputs of these on-line measurements show a map of surface height in real time. Experiments where a tunable dye laser was used were conducted to simulate the real-time measurements of step objects with specular and diffuse surfaces. The results have shown that a height map is available at any moment during the wavelength scan, and the measurement accuracy of height increases as the scanning proceeds. For a scanning width of 25 nm, the accuracy was as high as 1 mu m. Analyses of the measurement accuracy are given. (C) 1997 Optical Society of America.
机译：提出了适合于实时表面形状测量的波长扫描轮廓仪。在单个图像像素在线上测量由波长扫描生成的干扰信号的相位斜率。这些在线测量的并行输出实时显示表面高度图。进行了使用可调染料激光的实验，以模拟具有镜面和漫射表面的阶梯对象的实时测量。结果表明，在波长扫描期间的任何时候都可以使用高度图，并且高度的测量精度会随着扫描的进行而增加。对于25 nm的扫描宽度，精度高达1μm。给出了测量精度的分析。 （C）1997年美国眼镜学会。

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