SIMULATION OF LIGHT SCATTERING FROM A PARTICLE UPON A WAFER SURFACE

Eremin Y.; Orlov N.

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SIMULATION OF LIGHT SCATTERING FROM A PARTICLE UPON A WAFER SURFACE

机译：晶片表面上粒子的光散射模拟

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We simulated light scattering from a particle located on a smooth surface. We developed a new approach utilizing the discrete sources method based on a strict mathematical model for this scattering problem. The main features of the corresponding numerical algorithm are presented. The results of modeling and comparisons with other theoretical results and experimental data are shown as well. (C) 1996 Optical Society of America [References: 9]

机译：我们模拟了来自位于光滑表面上的粒子的光散射。我们针对此散射问题开发了一种基于严格数学模型的，利用离散源方法的新方法。介绍了相应数值算法的主要特征。还显示了建模结果以及与其他理论结果和实验数据的比较。（C）1996年美国眼镜学会[参考文献：9]

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《Applied optics》 |1996年第33期|共6页
作者
Eremin Y.; Orlov N.;
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正文语种 eng
中图分类光学;
关键词
Light scattering; Particle on a substrate; Maxwell equations; Numerical solution;

机译：光散射;基体上的颗粒;麦克斯韦方程;数值解;

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专利

1. SIMULATION OF LIGHT SCATTERING FROM A PARTICLE UPON A WAFER SURFACE [J] . Eremin Y., Orlov N. Applied optics . 1996,第33期

机译：晶片表面上粒子的光散射模拟
2. Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method [J] . Satoshi Sasaki, Hiroshi An, Yuzo Mori 精密工学会誌 . 2001,第11期

机译：激光散射法测量硅片表面纳米微粒
3. Measurement of ultra fine particles on the Si wafer surface using a laser light scattering method [J] . Haruyuki Inoue, Toshihiko Kataoka, Katsuyoshi Endo 精密工学会誌 . 1997,第8期

机译：使用激光散射法测量硅晶片表面上的超细颗粒
4. PARTICLE SIZING AND COUNTING USING A NEW LASER LIGHT SCATTERING DETECTION TECHNIQUE ON SILICON WAFER SURFACES [C] . Jose Candido de Souza Filho, Sebastiao Gomes dos Santos Filho Proceedings vol.2005-08; International Symposium on Microelectronics Technology and Devices(SBMICRO 2005); 200509; . 2005

机译：在硅晶片表面上使用新型激光散射检测技术进行颗粒尺寸计算
5. Light scattering by submicron particles and defects on smooth and patterned surfaces. [D] . Starr, Gregory Wayne. 1997

机译：亚微米颗粒的光散射和光滑且有图案的表面上的缺陷。
6. Atomic-Layer-Deposition Assisted Formation of Wafer-Scale Double-Layer Metal Nanoparticles with Tunable Nanogap for Surface-Enhanced Raman Scattering [O] . Yan-Qiang Cao, Kang Qin, Lin Zhu, -1

机译：具有可调整纳米间隙的晶圆级双层金属纳米粒子的原子层沉积辅助形成用于表面增强拉曼散射
7. Measurement of Nano-fine Particles on Si Wafer Surface by Laser Light Scattering Method. [O] . Satoshi SASAKI, Hiroshi AN, Yuzo MORI, 2001

机译：激光散射法测量Si晶片表面上的纳米细颗粒。
8. Monte Carlo simulations of light scattering by composite particles in a planetary surface [R] . Hillier, J., Buratti, B. 2001

机译：蒙特卡罗模拟行星表面复合粒子的光散射

SIMULATION OF LIGHT SCATTERING FROM A PARTICLE UPON A WAFER SURFACE

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