Characterization of diffraction gratings by use of a tabletop soft-x-ray laser

Max Seminario; Jorge J. Rocca; Ricardo A. Depine; Benny Bach; Bernie Bach

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Characterization of diffraction gratings by use of a tabletop soft-x-ray laser

机译：使用台式软X射线激光器表征衍射光栅

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We have demonstrated the use of a high-repetition-rate 46.9-nm tabletop laser to characterize diffraction gratings designed for grazing-incidence operation in the soft-x-ray spectral region. The efficiencies for various diffraction orders were measured as a function of angle of incidence and compared with the results of model simulations. This measurement technique provides benchmarks with which to improve electromagnetic codes used in the design of soft-x-ray diffraction gratings. The results illustrate the potential of compact tabletop soft-x-ray lasers for use as a new tool for characterization of shortwavelength optics at the manufacturer's site.

机译：我们已经证明了使用高重复频率的46.9 nm台式激光器来表征为软X射线光谱区域中的掠入射操作设计的衍射光栅。测量各种衍射级的效率与入射角的关系，并将其与模型仿真的结果进行比较。这种测量技术提供了基准，可用来改进软X射线衍射光栅设计中使用的电磁代码。结果表明，紧凑型台式软X射线激光器有潜力用作制造商现场表征短波光学器件的新工具。

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《Applied optics》 |2001年第30期|共6页
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Max Seminario; Jorge J. Rocca; Ricardo A. Depine; Benny Bach; Bernie Bach;
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中图分类光学;
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1. Characterization of diffraction gratings by use of a tabletop soft-x-ray laser [J] . Max Seminario, Jorge J. Rocca, Ricardo A. Depine, Applied optics . 2001,第30期

机译：使用台式软X射线激光器表征衍射光栅
2. Dense plasma interferometry with a tabletop soft X-ray laser and an amplitude division interferometer based on diffraction gratings [J] . J. Filevich, M. C. Marconi, K. Kanizay, Journal de Physique, IV: Proceedings of International Conference . 2001,第2期

机译：使用台式软X射线激光器和基于衍射光栅的分频干涉仪进行密集等离子体干涉仪
3. Fabrication and characterization of diffraction gratings in ophthalmic polymers by using UV direct laser interference patterning [J] . Sola D., Alamri S., Lasagni A. F., Applied Surface Science . 2019,第MAYa15期

机译：紫外直接激光干涉图样在眼科聚合物中制备和表征衍射光栅
4. Characterization of Diffraction Gratings using a Tabletop Soft X-Ray Laser [C] . B. Bach, R. A. Depine, J. J. Rocca, Iberoamerican meeting on optics . 2001

机译：使用桌面软X射线激光器的衍射光栅的表征
5. Direct laser fabrication of diffraction gratings on polymer thin films and waveguides. [D] . Hutchinson, Glenn David. 2005

机译：在聚合物薄膜和波导上直接激光制造衍射光栅。
6. Direct Laser Interference Patterning of Diffraction Gratings in Safrofilcon-A Hydrogel: Fabrication and Hydration Assessment [O] . Daniel Sola, Stephan Milles, Andrés F. Lasagni 2021

机译：SAFROFILCON-A水凝胶中衍射光栅的直接激光干扰图案：制造和水合评估
7. Dense plasma interferometry with a tabletop soft X-ray laser and an amplitude division interferometer based on diffraction gratings [O] . J. Filevich, M. C. Marconi, K. Kanizay, 2001

机译：基于衍射光栅的致密等离子体干涉测量与桌面软X射线激光器和振幅分割干涉仪
8. Femtosecond Diffractive Imaging with a Soft-X-Ray Free-Electron Laser. [R] . Chapman, H. N., Barty, A., Bogan, M. J., 2010

机译：用软X射线自由电子激光器进行飞秒衍射成像。

Characterization of diffraction gratings by use of a tabletop soft-x-ray laser

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