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Spectral interference Mirau microscope with an acousto-optic tunable filter for three-dimensional surface profilometry

机译：光谱干涉Mirau显微镜带有声光可调滤镜，用于三维表面轮廓测量

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摘要

A nonmechanical scanning Mirau-type spectral interference microscope has been developed for the measurement of three-dimensional surface profiles of discontinuous objects. An acousto-optic tunable filter (AOTF) is used as a high-resolution spectral filter, which scans the optical frequency of the broadband light emitted from a superluminescent diode. To generate spectral fringes that make full use of the limited coherence length of the filtered light we unbalanced the Mirau interferometric system by positioning the reference mirror nearly halfway between the top and the bottom of the step height. When the frequency of the broadband light source is scanned by an AOTF, the interference fringes move in opposite directions on the top and the bottom of the object. To uniquely determine the sign of the fringe movement over the large area of the object, we developed a three-dimensional Fourier-transform technique, and from the detected sign of the fringe movement and phase information, we determined the three-dimensional step height. Experimental results of the measurement of 100-μm step height are presented. The main advantages of the proposed system are that it provides nonmechanical scanning and a large measurement range without ambiguity in the sign of the phase.
机译：已经开发出一种非机械扫描Mirau型光谱干涉显微镜，用于测量不连续物体的三维表面轮廓。声光可调滤光片（AOTF）被用作高分辨率光谱滤光片，它扫描从超发光二极管发出的宽带光的光频率。为了产生充分利用滤光的有限相干长度的光谱条纹，我们通过将参考镜放置在阶梯高度的顶部和底部之间的近一半位置，使Mirau干涉测量系统失衡。当AOTF扫描宽带光源的频率时，干涉条纹在对象的顶部和底部沿相反的方向移动。为了唯一确定物体大面积上的条纹运动迹象，我们开发了三维傅里叶变换技术，并根据检测到的条纹运动和相位信息的迹象，确定了三维步长。给出了测量100μm台阶高度的实验结果。提出的系统的主要优点是，它提供了非机械扫描和较大的测量范围，并且在相位符号上没有歧义。

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    《Applied optics》 |2003年第7期|共10页
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  • 正文语种 eng
  • 中图分类 光学;
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