An instrument for operational roughness control of large-area ultrasmooth surfaces by X-ray scanning reflectometry

V. V. Protopopov; K. A. Valiev; R. M. Imamov

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An instrument for operational roughness control of large-area ultrasmooth surfaces by X-ray scanning reflectometry

机译：一种通过X射线扫描反射仪控制大面积超光滑表面的粗糙度的仪器

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An instrument for two-dimensional imaging of the spatial roughness distribution of a flat surface with a root-mean-square roughness of the order of one nanometer (nanoroughness) is described. The instrument is based on the use of the relationship between the reflectivity and the roughness of an ultrasmooth surface in the x-ray wavelength range. The main components of the instrument are a high-precision linear mechanical scanner, an x-ray collimator, and a temperature-controlled cooled detector (linear photodiode array) with a quantum sensitivity at the wavelength of CuK{sub}α-radiation.

机译：描述了一种用于对平面表面的空间粗糙度分布进行二维成像的仪器，其均方根粗糙度约为1纳米（纳米粗糙度）。该仪器基于在X射线波长范围内反射率和超光滑表面粗糙度之间的关系。该仪器的主要组件是高精度线性机械扫描仪，X射线准直仪和温度控制的冷探测器（线性光电二极管阵列），在CuK {sub}α辐射的波长处具有量子灵敏度。

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《Industrial Laboratory: Diagnostics of Materials》 |2000年第1期|共6页
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V. V. Protopopov; K. A. Valiev; R. M. Imamov;
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1. An instrument for operational roughness control of large-area ultrasmooth surfaces by X-ray scanning reflectometry [J] . V. V. Protopopov, K. A. Valiev, R. M. Imamov Industrial Laboratory: Diagnostics of Materials . 2000,第1期

机译：一种通过X射线扫描反射仪控制大面积超光滑表面的粗糙度的仪器
2. Influence of the surface roughness on the properties of Au films measured by surface plasmon resonance and X-ray reflectometry [J] . Tzvetan Velinov, Lyubomir Ahtapodov, Andrew Nelson, Thin Solid Films . 2011,第7期

机译：表面粗糙度对表面等离子体激元共振和X射线反射法测量Au膜性能的影响
3. Comparative x-ray reflectometry and atomic force microscopy of surfaces with non-Gaussian roughness [J] . V. L. Mironov, O. G. Udalov, B. A. Gribkov, Journal of Applied Physics . 2008,第6期

机译：具有非高斯粗糙度的表面的比较X射线反射法和原子力显微镜
4. Roughness characterization of ultrasmooth surfaces using common-path interferometry [C] . Baishi Wang, Chapman Instruments, Rochester, Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays . 1999

机译：使用共路径干涉法表征超光滑表面的粗糙度
5. Investigation of the hydrodynamic tumbling transition in liquid crystal polymers by scanning angle reflectometry and controlled stress rheometry [D] . Abad, Michael Anthony. 1993

机译：扫描角反射法和受控应力流变法研究液晶聚合物中的流体动力学翻滚转变
6. A new method for assessment of nickel-titanium endodontic instrument surface roughness using field emission scanning electronic microscope [O] . Khoa Van Pham, Canh Quang Vo 2020

机译：使用现场发射扫描电子显微镜评估镍钛牙髓表面粗糙度的新方法
7. Special/Issue. Surface Control Technology for LSI Processes. Roughness Evaluation of Silicon Surfaces by Scanning Force Miroscopy. [O] . Mineharu SUZUKI 1994

机译：特别/问题。 LSI过程的表面控制技术。扫描力探测摩擦镜粗糙度评价硅表面。
8. Implementation of the Surface Roughness Instrument (SRI) Controller [R] . Moncarz, H. T. , Vorburger, T. V. 1988

机译：表面粗糙度仪（sRI）控制器的实现

An instrument for operational roughness control of large-area ultrasmooth surfaces by X-ray scanning reflectometry

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