New optical near-field nanolithography with optical fiber probe laser irradiating atomic force microscopy probe tip

Cui Jianlei; Yang Lijun; Xie Hui; Wang Yang; Mei Xuesong; Wang Kedian; Wang Wenjun; Hou Chaojian

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New optical near-field nanolithography with optical fiber probe laser irradiating atomic force microscopy probe tip

机译：光纤探针激光辐照原子力显微镜探针的新型光学近场纳米光刻技术

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摘要

A new optical near-field nanolithography scheme with optical fiber probe laser irradiating atomic force microscopy (AFM) probe tip is proposed. Through optical theoretical analysis, if the metallic AFM probe tip is in the evanescent field of optical fiber probe tip, the secondary near-field enhancement effect can appear underneath the metallic AFM probe tip. Based on the independently developed AFM system and optical system, the nanolithography platform is built and nanocraters structures can be successfully created, which demonstrates that the new scheme is an effective and promising nanolithography approach for the future nanoelectronics, nanobiotechnology, nanowelding, etc.

机译：提出了一种采用光纤探针激光辐照原子力显微镜（AFM）探针尖端的近场纳米光刻新方案。通过光学理论分析，如果金属AFM探针尖端位于光纤探针尖端的the逝场中，则次级近场增强效果可能会出现在金属AFM探针尖端下方。在独立开发的AFM系统和光学系统的基础上，构建了纳米光刻平台并可以成功创建纳米坑结构，这表明该新方案对于未来的纳米电子学，纳米生物技术，纳米焊接等是一种有效且有前途的纳米光刻方法。

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来源
《Integrated Ferroelectrics》 |2016年第null期|共9页
作者
Cui Jianlei; Yang Lijun; Xie Hui; Wang Yang; Mei Xuesong; Wang Kedian; Wang Wenjun; Hou Chaojian;
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正文语种 eng
中图分类电磁学、电动力学;
关键词
Nanolithography; near-field; laser; metallic probe tip; atomic force microscope (AFM);

机译：纳米光刻;近场;激光;金属探针;原子力显微镜（AFM）;

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专利

1. New optical near-field nanolithography with optical fiber probe laser irradiating atomic force microscopy probe tip [J] . Cui Jianlei, Yang Lijun, Xie Hui, Integrated Ferroelectrics . 2016,第Null期

机译：光纤探针激光辐照原子力显微镜探针的新型光学近场纳米光刻技术
2. Nanospot Soldering Polystyrene Nanoparticles with an Optical Fiber Probe Laser Irradiating a Metallic AFM Probe Based on the Near-Field Enhancement Effect [J] . Cui Jianlei, Yang Lijun, Wang Yang, ACS applied materials & interfaces . 2015,第4期

机译：基于近场增强效应的光纤探针激光辐照金属AFM探针的纳米点焊接聚苯乙烯纳米颗粒
3. Nanospot welding of carbon nanotubes using near-field enhancement effect of AFM probe irradiated by optical fiber probe laser [J] . Yang Lijun, Cui Jianlei, Wang Yang, RSC Advances . 2015,第70期

机译：使用光纤探针激光照射AFM探针的近场增强效应碳纳米管的纳米型焊接
4. Bent-fiber near-field scanning optical microscopy probes for use with commercial atomic force microscopes [C] . Roderick S. Taylor, National Research Council of Canada, Ottawa, Micromachining and Imaging . -1

机译：弯曲纤维近场扫描光学显微镜探头，用于商业原子力显微镜
5. Probing biological systems with optical and atomic force microscopy. [D] . Santos, John Paul. 1998

机译：用光学和原子力显微镜探测生物系统。
6. True Tapping Mode Scanning Near-Field Optical Microscopy with Bent Glass Fiber Probes [O] . A. Smirnov, V. M. Yasinskii, D. S. Filimonenko, 2018

机译：带有弯曲玻璃纤维探头的真攻丝模式扫描近场光学显微镜
7. Opto-mechanical probe for combining atomic force microscopy and optical near-field surface analysis [O] . van Hoorn, C.H., Chavan, D.C., Tiribilli, B, 2014

机译：结合原子力显微镜和光学近场表面分析的光机械探针

New optical near-field nanolithography with optical fiber probe laser irradiating atomic force microscopy probe tip

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