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首页> 外文期刊>RSC Advances >Nanospot welding of carbon nanotubes using near-field enhancement effect of AFM probe irradiated by optical fiber probe laser
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Nanospot welding of carbon nanotubes using near-field enhancement effect of AFM probe irradiated by optical fiber probe laser

机译：使用光纤探针激光照射AFM探针的近场增强效应碳纳米管的纳米型焊接

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摘要

The miniaturization of electronic devices into the nanometer scale is indispensable for next-generation semiconductor technology, and carbon nanotubes are considered to be the promising candidates for the future interconnection wires. To study carbon nanotube interconnection during nanowelding, we propose a new nanospot welding method with the near-field enhancement effect of the metallic AFM probe tip irradiated by an optical fiber probe laser. Based on theoretically analyzing the near-field enhancement effect, we set up the experimental system for nanospot welding with good interconnection results of silver nanoparticles and carbon nanotubes, not only proving that the interconnection operation of CNTs can be effectively achieved through the melting process of nanoparticles by the thermal AFM probe tip irradiated by an optical fiber probe laser, but also providing a promising technical approach for nanospot welding.
机译：电子器件的小型化进入纳米尺度对于下一代半导体技术是必不可少的，并且碳纳米管被认为是未来互连线的有希望的候选者。 为了在纳米电池期间研究碳纳米管互连，我们提出了一种新的纳米多孔焊接方法，其具有由光纤探针激光照射的金属AFM探针尖端的近场增强效果。 基于理论上分析近场增强效果，我们设立了纳米颗粒和碳纳米管的良好互连结果的纳米孔焊接实验系统，不仅证明了通过纳米颗粒的熔化过程可以有效地实现CNT的互连操作 通过光纤探针激光照射的热AFM探针尖端，而且为纳米多焊接焊接提供有希望的技术方法。

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  • 来源
    《RSC Advances》 |2015年第70期|共9页
  • 作者

    Yang Lijun; Cui Jianlei; Wang Yang; Hou Chaojian; Xie Hui; Mei Xuesong; Wang Wenjun; Wang Kedian;

  • 作者单位

    Harbin Inst Technol Key Lab Microsyst &

    Microstruct Mfg Minist Educ Harbin 150001 Peoples R China;

    Harbin Inst Technol Key Lab Microsyst &

    Microstruct Mfg Minist Educ Harbin 150001 Peoples R China;

    Harbin Inst Technol Key Lab Microsyst &

    Microstruct Mfg Minist Educ Harbin 150001 Peoples R China;

    Harbin Inst Technol Key Lab Microsyst &

    Microstruct Mfg Minist Educ Harbin 150001 Peoples R China;

    Harbin Inst Technol State Key Lab Robot &

    Syst Harbin 150001 Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

    Xi An Jiao Tong Univ State Key Lab Mfg Syst Engn Xian 710049 Peoples R China;

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  • 正文语种 eng
  • 中图分类 化学;
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