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首页> 外文期刊>International journal of applied electromagnetics and mechanics >Metallic thin film composites with shape memory alloys for microswitches and tactile graphical displays
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Metallic thin film composites with shape memory alloys for microswitches and tactile graphical displays

机译：具有形状记忆合金的金属薄膜复合材料，用于微动开关和触觉图形显示器

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摘要

A new mechanism to switch thin film actuators between two stable states has been developed. Bistable membrane switches can be realized by snap-dome shaped metallic foils which are coated on opposite surfaces with Ti(Ni,Cu) and (Ti,Hf)Ni respectively whereby the narrow hysteresis of Ti(Ni,Cu) is within the broad one of (Ti,Hf)Ni. If both SMAs are martensitic or both are austenitic, they apply similar forces on the intermediate foil and the shape of the membrane remains constant. However, if one of them is austenitic and the other one martensitic, the austenitic one determines the curvature of the membrane. Switching is possible by two different heat pulses. Therefore, energy is only required to change the state of the membrane. The new mechanism is described and first successful processing steps are presented. The mechanism allows the fabrication of microswitches and tactile displays.
机译：已经开发了在两个稳定状态之间切换薄膜致动器的新机制。双稳态薄膜开关可以通过圆顶形的金属箔来实现，该金属箔在相对的表面分别涂有Ti（Ni，Cu）和（Ti，Hf）Ni，从而Ti（Ni，Cu）的窄磁滞在宽范围内（Ti，Hf）Ni的如果两种SMA均为马氏体或两种均为奥氏体，则它们会在中间箔上施加相似的力，并且膜的形状保持恒定。但是，如果其中一个是奥氏体而另一个是马氏体，则奥氏体决定了膜的曲率。可以通过两个不同的热脉冲进行切换。因此，仅需要能量来改变膜的状态。描述了新机制，并介绍了第一个成功的处理步骤。该机制允许制造微动开关和触觉显示器。

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